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Nanostructure multilayer dielectric materials for capacitors and insulators

Patent ·
OSTI ID:871490
 [1]
  1. Livermore, CA
+ Show Author Affiliations

A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3) in alternating layers to form a nano-laminate.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 5742471
Application Number:
08/755619
OSTI ID:
871490
Country of Publication:
United States
Language:
English

References (1)

Novel high Voltage Vacuum Surface Flashover Insulator Technology conference January 1993

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/361/29/
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