Process for ion-assisted laser deposition of biaxially textured layer on substrate

Russo, Richard E; Reade, Ronald P; Garrison, Stephen M; Berdahl, Paul

Process for ion-assisted laser deposition of biaxially textured layer on substrate

Patent · Sat Dec 31 23:00:00 EST 1994

OSTI ID:869972

Russo, Richard E ^[1]; Reade, Ronald P ^[2]; Garrison, Stephen M ^[3]; Berdahl, Paul ^[4]

Walnut Creek, CA
Berkeley, CA
Palo Alto, CA
Oakland, CA

A process for depositing a biaxially aligned intermediate layer over a non-single crystal substrate is disclosed which permits the subsequent deposition thereon of a biaxially oriented superconducting film. The process comprises depositing on a substrate by laser ablation a material capable of being biaxially oriented and also capable of inhibiting the migration of substrate materials through the intermediate layer into such a superconducting film, while simultaneously bombarding the substrate with an ion beam. In a preferred embodiment, the deposition is carried out in the same chamber used to subsequently deposit a superconducting film over the intermediate layer. In a further aspect of the invention, the deposition of the superconducting layer over the biaxially oriented intermediate layer is also carried out by laser ablation with optional additional bombardment of the coated substrate with an ion beam during the deposition of the superconducting film.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA

DOE Contract Number:: AC03-76SF00098

Assignee:: Regents of University of California (Oakland, CA)

Patent Number(s):: US 5432151

OSTI ID:: 869972

Country of Publication:: United States

Language:: English

References (16)

Synthesis of superconducting YBa ₂ Cu ₃ O _7−δ thin films on nickel‐based superalloy using in situ pulsed laser deposition Kumar, Ashok; Ganapathi, L.; Kanetkar, S. M. Applied Physics Letters, Vol. 57, Issue 24 https://doi.org/10.1063/1.103825	journal	December 1990
Theory of thin‐film orientation by ion bombardment during deposition Bradley, R. Mark; Harper, James M. E.; Smith, David A. Journal of Applied Physics, Vol. 60, Issue 12 https://doi.org/10.1063/1.337499	journal	December 1986
Observation of two in‐plane epitaxial states in YBa ₂ Cu ₃ O _7−δ films on yttria‐stabilized ZrO ₂ Garrison, S. M.; Newman, N.; Cole, B. F. Applied Physics Letters, Vol. 58, Issue 19 https://doi.org/10.1063/1.104995	journal	May 1991
Laser deposition of biaxially textured yttria‐stabilized zirconia buffer layers on polycrystalline metallic alloys for high critical current Y‐Ba‐Cu‐O thin films Reade, R. P.; Berdahl, P.; Russo, R. E. Applied Physics Letters, Vol. 61, Issue 18 https://doi.org/10.1063/1.108277	journal	November 1992
Biaxially Aligned YSZ Buffer Layer on Polycrystalline Substrates Iijima, Y.; Tanabe, N.; Kohno, O. Advances in Superconductivity IV https://doi.org/10.1007/978-4-431-68195-3_145	book	January 1992
In-plane texturing control of Y-Ba-Cu-O thin films on polycrystalline substrates by ion-beam-modified intermediate buffer layers Iijima, Y.; Onabe, K.; Futaki, N. IEEE Transactions on Applied Superconductivity, Vol. 3, Issue 1 https://doi.org/10.1109/77.233380	journal	March 1993
High critical currents in strained epitaxial YBa ₂ Cu ₃ O _7−δ on Si Fork, D. K.; Fenner, D. B.; Barton, R. W. Applied Physics Letters, Vol. 57, Issue 11 https://doi.org/10.1063/1.104225	journal	September 1990
Characterization of Y‐Ba‐Cu‐O thin films and yttria‐stabilized zirconia intermediate layers on metal alloys grown by pulsed laser deposition Reade, R. P.; Mao, X. L.; Russo, R. E. Applied Physics Letters, Vol. 59, Issue 6 https://doi.org/10.1063/1.105329	journal	August 1991
High critical current densities in YBa ₂ Cu ₃ O _{7− x} films on polycrystalline zirconia Norton, David P.; Lowndes, Douglas H.; Budai, J. D. Applied Physics Letters, Vol. 57, Issue 11 https://doi.org/10.1063/1.104226	journal	September 1990
Angular magnetoresistance provides texture information on high-Tc conductors Berdahl, P.; Mao, X. L.; Reade, R. P. Physica C: Superconductivity, Vol. 195, Issue 1-2 https://doi.org/10.1016/0921-4534(92)90079-R	journal	May 1992
In‐plane aligned YBa ₂ Cu ₃ O _{7− x} thin films deposited on polycrystalline metallic substrates Iijima, Y.; Tanabe, N.; Kohno, O. Applied Physics Letters, Vol. 60, Issue 6 https://doi.org/10.1063/1.106514	journal	February 1992
Sputter deposition of YBa ₂ Cu ₃ O _{7− x} films on Si at 500 °C with conducting metallic oxide as a buffer layer Jia, Q. X.; Anderson, W. A. Applied Physics Letters, Vol. 57, Issue 3 https://doi.org/10.1063/1.104218	journal	July 1990
Superconducting transport properties of grain boundaries in YBa 2 Cu 3 O 7 bicrystals Dimos, D.; Chaudhari, P.; Mannhart, J. Physical Review B, Vol. 41, Issue 7 https://doi.org/10.1103/PhysRevB.41.4038	journal	March 1990
In situ single chamber laser processing of YBa ₂ Cu ₃ O _7−δ superconducting thin films on Si (100) with yttria‐stabilized zirconia buffer layers Tiwari, P.; Kanetkar, S. M.; Sharan, S. Applied Physics Letters, Vol. 57, Issue 15 https://doi.org/10.1063/1.103358	journal	October 1990
Critical current density enhancement in YBa ₂ Cu ₃ O _6.8 films on buffered metallic substrates Narumi, E.; Song, L. W.; Yang, F. Applied Physics Letters, Vol. 58, Issue 11 https://doi.org/10.1063/1.104364	journal	March 1991
Metal buffer layers and Y‐Ba‐Cu‐O thin films on Pt and stainless steel using pulsed laser deposition Russo, R. E.; Reade, R. P.; McMillan, J. M. Journal of Applied Physics, Vol. 68, Issue 3 https://doi.org/10.1063/1.346681	journal	August 1990

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/505/427/
ablation
additional
aligned
aspect
axially align
axially aligned
beam
biaxially
biaxially oriented
biaxially textured
bombarding
bombardment
capable
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comprises
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conducting film
conducting layer
crystal
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intermediate
intermediate layer
ion-assisted
laser
laser ablation
laser deposition
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material
material capable
materials
migration
non-single
optional
oriented
oriented superconducting
permits
preferred
preferred embodiment
process
process comprises
simultaneously
single crystal
subsequent
subsequent deposition
subsequently
subsequently deposit
substrate
substrate material
superconducting
superconducting film
superconducting layer
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Process for ion-assisted laser deposition of biaxially textured layer on substrate

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