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Title: Conductive and robust nitride buffer layers on biaxially textured substrates

Abstract

The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metals and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layer. In some embodiments the article further comprises electromagnetic devices which may have superconducting properties.

Inventors:
 [1];  [2];  [3];  [4];  [2]
  1. Chicago, IL
  2. Knoxville, TN
  3. Evanston, IL
  4. Skokie, IL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
986328
Patent Number(s):
7,510,997
Application Number:
10/919,630
Assignee:
Applied Thin Films, Inc. (Evanston, IL) UT-Battelle, LLC (Oak Ridge, TN) ORO
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Sankar, Sambasivan, Goyal, Amit, Barnett, Scott A, Kim, Ilwon, and Kroeger, Donald M. Conductive and robust nitride buffer layers on biaxially textured substrates. United States: N. p., 2009. Web.
Sankar, Sambasivan, Goyal, Amit, Barnett, Scott A, Kim, Ilwon, & Kroeger, Donald M. Conductive and robust nitride buffer layers on biaxially textured substrates. United States.
Sankar, Sambasivan, Goyal, Amit, Barnett, Scott A, Kim, Ilwon, and Kroeger, Donald M. Tue . "Conductive and robust nitride buffer layers on biaxially textured substrates". United States. https://www.osti.gov/servlets/purl/986328.
@article{osti_986328,
title = {Conductive and robust nitride buffer layers on biaxially textured substrates},
author = {Sankar, Sambasivan and Goyal, Amit and Barnett, Scott A and Kim, Ilwon and Kroeger, Donald M},
abstractNote = {The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metals and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layer. In some embodiments the article further comprises electromagnetic devices which may have superconducting properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {3}
}

Patent:

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