Conductive and robust nitride buffer layers on biaxially textured substrates
Patent
·
OSTI ID:1175005
The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metal and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layers. In some embodiments the article further comprises electromagnetic devices which may be super conducting properties.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE
- Assignee:
- Applied Thin Films, Inc. (Evanston, IL)
- Patent Number(s):
- 6,784,139
- Application Number:
- 09/895,866
- OSTI ID:
- 1175005
- Country of Publication:
- United States
- Language:
- English
Enhancement in critical current density of Y 1 Ba 2 Cu 3 O 7−δ thin films on hastelloy with TiN buffer layers
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journal | August 1992 |
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