Cl{sub 2}/Ar High Density Plasma Damage in GaN Schotky Diodes
Journal Article
·
· Jounal of Electrochemical Society
OSTI ID:8409
- Sandia National Laboratories
No abstract prepared.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 8409
- Report Number(s):
- SAND99-1639J
- Journal Information:
- Jounal of Electrochemical Society, Journal Name: Jounal of Electrochemical Society
- Country of Publication:
- United States
- Language:
- English
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