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Bent-Beam Electrothermal Actuators: Linear and Rotary MicroEngines

Journal Article · · Journal of Microelectromechanical Systems
OSTI ID:763396
 [1]; ; ;
  1. Sandia National Laboratories
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No abstract prepared.

Research Organization:
Sandia National Labs., Albuquerque, NM, and Livermore, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
763396
Report Number(s):
SAND2000-2364J
Journal Information:
Journal of Microelectromechanical Systems, Journal Name: Journal of Microelectromechanical Systems
Country of Publication:
United States
Language:
English

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Related Subjects

33 ADVANCED PROPULSION SYSTEMS
ACTUATORS
ENGINES
ROTARY ENGINES