Magnetic force and thermal expansion as failure mechanisms of electrothermal MEMS actuators under ESD testing.
Journal Article
·
· Proposed for publication in Journal of
Microelectromechanical Systems.
OSTI ID:876398
No abstract prepared.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 876398
- Report Number(s):
- SAND2005-4333J
- Journal Information:
- Proposed for publication in Journal of Microelectromechanical Systems., Journal Name: Proposed for publication in Journal of Microelectromechanical Systems.
- Country of Publication:
- United States
- Language:
- English
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