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U.S. Department of Energy
Office of Scientific and Technical Information
 

Polysilicon MEMS opto-thermal actuator design and performance.

Conference ·
OSTI ID:947832
; ; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
947832
Report Number(s):
SAND2004-5245C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
ACTUATORS
DESIGN
MICROELECTRONIC CIRCUITS
PERFORMANCE
POLYCRYSTALS
SILICON