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Lifetime studies of electrothermal bent-beam actuators in single crystal silicon and polysilicon.

Journal Article · Tue Apr 01 04:00:00 EST 2003 · Proposed for publication in Journal of Microelectromechanical Systems.

OSTI ID:923584

Gianchandani, Yogesh B ^[1]; Chu, Larry L ^[1]; Que, Long ^[1]; Oliver, Andrew David

University of Wisconsin, Madison, WI

No abstract prepared.

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Research Organization:: Sandia National Laboratories

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 923584

Report Number(s):: SAND2003-1513J

Journal Information:: Proposed for publication in Journal of Microelectromechanical Systems., Journal Name: Proposed for publication in Journal of Microelectromechanical Systems.

Country of Publication:: United States

Language:: English

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Related Subjects

42 ENGINEERING
ACTUATORS
MINIATURIZATION
MONOCRYSTALS
SERVICE LIFE
SILICON