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Low Power Electrothermal Actuation for Microelectromechanical Systems.

Journal Article · Fri Feb 29 23:00:00 EST 2008 · Journal of Micro/Nanolithography, MEMS, and MOEMS

DOI:https://doi.org/10.1117/1.3013549· OSTI ID:1145959

Skinner, Jack L.; Gianoulakis, Steven E. ^[1]; Strong, Fabian W.; Dentinger, Paul M.

Sandia National Laboratories, Albuquerque, NM

Abstract not provided.

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Research Organization:: Sandia National Laboratories Albuquerque, NM; Sandia National Laboratories (SNL-CA), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1145959

Report Number(s):: SAND2008-1613J; 520026

Journal Information:: Journal of Micro/Nanolithography, MEMS, and MOEMS, Journal Name: Journal of Micro/Nanolithography, MEMS, and MOEMS Journal Issue: 4 Vol. 7; ISSN 1932-5150

Country of Publication:: United States

Language:: English

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