Phase 2 of the automated array assembly task of the low cost silicon solar array project. Technical quarterly report No. 1, September 27--December 31, 1977. Motorola report No. 2345/1
A process sequence for manufacturing silicon solar cell modules was chosen for detailed study. This sequence, when automated, is expected to be capable of mass producing modules combining high efficiency, low cost, high reliability, and minimal consumed materials and waste disposal. Specific steps are (1) plasma etch of silicon; (2) apply wax etch stop (one side); (3) texture etch; remove etch stop; (4) silicon nitride deposition (vacuum CVD); (5) form metallization pattern in Si/sub 3/N/sub 4/ (contact masked plasma etch); (6) ion implant back surface field region; (7) ion implant P-N junction; (8) thermal anneal of implant damage; (9) plate metal (front and back); solder coat; (10) test cells; interconnect; and (11) encapsulate. A wax which appears to display all the characteristics necessary for use as an etch stop has been selected and tested. Plasma etching of silicon, and contact-masked plasma etching of silicon nitride, have been shown to be feasible. Compatibility of simultaneous front and back plated metallization with this process sequence has been shown. Ion implantation studies have been delayed due to a longer-than-anticipated equipment installation time.
- Research Organization:
- Motorola, Inc., Phoenix, AZ (USA). Semiconductor Group
- DOE Contract Number:
- NAS-7-100-954847
- OSTI ID:
- 6866713
- Report Number(s):
- DOE/JPL/954847-1
- Country of Publication:
- United States
- Language:
- English
Similar Records
Phase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Technical quarterly report No. 5, July 1-September 30, 1979
Phase 2 of the automated array assembly task of the low-cost silicon solar array project. Final report, 1 April 1979-31 March 1980
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Technical Report
·
Sun Dec 31 23:00:00 EST 1978
·
OSTI ID:5579283
Phase 2 of the automated array assembly task of the low-cost silicon solar array project. Final report, 1 April 1979-31 March 1980
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Mon Dec 31 23:00:00 EST 1979
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Phase 2 of the automated array assembly task of the low-cost silicon solar array project. Technical quarterly report No. 4, April 1-June 30, 1979
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Sun Dec 31 23:00:00 EST 1978
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
ENCAPSULATION
EQUIPMENT
ETCHING
HEAT TREATMENTS
ION IMPLANTATION
MANUFACTURING
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON NITRIDES
SILICON SOLAR CELLS
SOLAR CELL ARRAYS
SOLAR CELLS
SURFACE COATING
SURFACE FINISHING
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
ENCAPSULATION
EQUIPMENT
ETCHING
HEAT TREATMENTS
ION IMPLANTATION
MANUFACTURING
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON NITRIDES
SILICON SOLAR CELLS
SOLAR CELL ARRAYS
SOLAR CELLS
SURFACE COATING
SURFACE FINISHING