Phase 2 of the automated array assembly task of the low-cost silicon solar array project. Final report, 1 April 1979-31 March 1980
Several specific processing steps, as part of a total process sequence for manufacturing silicon solar cells, were studied during this contract. Ion implantation has been identified as the Motorola preferred process step for impurity doping. Unanalyzed beam ion implantation has been shown to have major cost advantages over analyzed beam implantation. Further, high quality cells have been fabricated using a high current unanalyzed beam. Mechanically masked plasma patterning of silicon nitride has been shown to be capable of forming fine lines on silicon surfaces with spacings between mask and substrate as great as 250 ..mu..m (10 mils). Extensive work was performed on advances in plated metallization. The need for the thick electroless palladium layer has been eliminated. Further, copper has been successfully utilized as a conductor layer, utilizing nickel as a barrier to copper diffusion into the silicon. Plasma etching of silicon for texturing and saw damage removal has been shown technically feasible, but not cost-effective compared to wet chemical etching techniques.
- Research Organization:
- Motorola, Inc., Phoenix, AZ (USA). Semiconductor Group
- DOE Contract Number:
- NAS-7-100-954847
- OSTI ID:
- 6774359
- Report Number(s):
- DOE/JPL/954847-80/8
- Country of Publication:
- United States
- Language:
- English
Similar Records
Phase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Technical quarterly report No. 6, 1 October 1979-31 December 1979
Phase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Technical quarterly report No. 5, July 1-September 30, 1979
Phase 2 of the automated array assembly task of the low cost silicon solar array project. Technical quarterly report No. 1, September 27--December 31, 1977. Motorola report No. 2345/1
Technical Report
·
Sun Dec 31 23:00:00 EST 1978
·
OSTI ID:5277125
Phase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Technical quarterly report No. 5, July 1-September 30, 1979
Technical Report
·
Sun Dec 31 23:00:00 EST 1978
·
OSTI ID:5579283
Phase 2 of the automated array assembly task of the low cost silicon solar array project. Technical quarterly report No. 1, September 27--December 31, 1977. Motorola report No. 2345/1
Technical Report
·
Fri Dec 31 23:00:00 EST 1976
·
OSTI ID:6866713
Related Subjects
14 SOLAR ENERGY
140901* -- Solar Thermal Utilization-- Space Heating & Cooling
AUTOMATION
COPPER
CRYSTAL DOPING
DIRECT ENERGY CONVERTERS
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
ION IMPLANTATION
MANUFACTURING
MASKING
METALS
NICKEL
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA
PNICTIDES
PROCESSING
PRODUCTION
RESEARCH PROGRAMS
SILICON COMPOUNDS
SILICON NITRIDES
SILICON SOLAR CELLS
SOLAR CELL ARRAYS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE FINISHING
TRANSITION ELEMENTS
140901* -- Solar Thermal Utilization-- Space Heating & Cooling
AUTOMATION
COPPER
CRYSTAL DOPING
DIRECT ENERGY CONVERTERS
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
ION IMPLANTATION
MANUFACTURING
MASKING
METALS
NICKEL
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA
PNICTIDES
PROCESSING
PRODUCTION
RESEARCH PROGRAMS
SILICON COMPOUNDS
SILICON NITRIDES
SILICON SOLAR CELLS
SOLAR CELL ARRAYS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE FINISHING
TRANSITION ELEMENTS