Thin film polycrystalline silicon solar cells. Quarterly technical progress report No. 3, 1 April 1980-30 June 1980
During this third quarter of the program, the high pressure plasma (hpp) deposition process has been thoroughly evaluated using SiHCl/sub 3/ and SiCl/sub 4/ silicon source gases, by the gas chromatographic analysis of the effluent gases from the reactor. Both the deposition efficiency and reactor throughput rate were found to be consistently higher for hpp mode of operation compared to conventional CVD mode. The figure of merit for various chlorosilanes as a silicon source gas for hpp deposition is discussed. A new continuous silicon film deposition scheme is developed, and system design is initiated. This new system employs gas interlocks and eliminates the need for gas curtains which have been found to be problematic. Solar cells (2 cm x 2 cm area) with AM1 efficiencies of up to 12% were fabricated on RTR grain enhanced hpp deposited films. The parameters of a 12% cell under simulated AM1 illumination were: V/sub OC/ = 0.582 volts, J/sub SC/ = 28.3 mA/cm/sup 2/ and F.F. = 73.0%.
- Research Organization:
- Motorola, Inc., Phoenix, AZ (USA)
- DOE Contract Number:
- AC02-77CH00178
- OSTI ID:
- 6774827
- Report Number(s):
- SERI/PR-8277-1-T1
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thin film polycrystalline silicon solar cells. Quarterly technical progress report No. 2, 1 January 1980-31 March 1980
Studies of the gas-phase reactive intermediates formed by heterogeneous processes in chlorosilane chemical vapor deposition using photoelectron spectroscopy and mass spectrometry
Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
CHEMICAL REACTORS
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELEMENTS
EQUILIBRIUM
EQUIPMENT
FABRICATION
FILMS
GRAIN SIZE
HYDRIDES
HYDROGEN COMPOUNDS
MICROSTRUCTURE
PERFORMANCE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
POLYCRYSTALS
RESEARCH PROGRAMS
RIBBON-TO-RIBBON METHOD
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SIZE
SOLAR CELLS
SOLAR EQUIPMENT
THERMODYNAMIC PROPERTIES