Thin-film polycrystalline silicon solar cells. Final technical report, 1 October 1979-30 September 1980
The objectives of this research program were: (1) investigation of a semicontinuous plasma deposition system as a means for efficient, high rate deposition of polycrystalline silicon films; (2) development of low-cost reuseable substrates for deposition and shear separation of the silicon films; (3) optimization of subsequent grain enhancement of the films through RTR laser recrystallization; and (4) demonstration of at least 12% efficient, large area (greater than 10 cm/sup 2/) solar cells fabricated on grain enhanced silicon films. Significant progress was made on all the tasks, and details are presented. Reuseable substrate system studies include characterization of the molybdenum temporary substrates as they are recycled through silicon film deposition-separation cycles, and establishment of the shear separation mechanism. High pressure plasma (HPP) deposition of microcrystalline silicon films is described. The deposition process was characterized by on-line gas chromatographic analysis of the reactor effluent gases under various conditions of substrate temperature, reactant flow rates, and concentrations using the chlorosilanes SiCl/sub 4/, SiHCl/sub 3/ and SiH/sub 2/Cl/sub 2/. A detailed characterization of grain-enhanced silicon films is given. The solar cell fabrication and evaluation effort is described in detail. (WHK)
- Research Organization:
- Motorola, Inc., Phoenix, AZ (USA)
- DOE Contract Number:
- AC02-77CH00178
- OSTI ID:
- 6535033
- Report Number(s):
- SERI/TR-8277-1-T2
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thin film polycrystalline silicon solar cells. Quarterly technical progress report No. 2, 1 January 1980-31 March 1980
Thin films of silicon on low-cost substrates. Final report
Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
CHROMATOGRAPHY
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FABRICATION
GAS CHROMATOGRAPHY
HEATING
LASER-RADIATION HEATING
METALS
MOLYBDENUM
MOLYBDENUM COMPOUNDS
MOLYBDENUM SILICIDES
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA ARC SPRAYING
PLASMA HEATING
POLYCRYSTALS
PRODUCTION
RECRYSTALLIZATION
REFRACTORY METALS
SEMIMETALS
SEPARATION PROCESSES
SILICIDES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPRAY COATING
SUBSTRATES
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS