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U.S. Department of Energy
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Thin films of silicon on low-cost substrates. Final report

Technical Report ·
DOI:https://doi.org/10.2172/6113785· OSTI ID:6113785
The main objective of this research program is to develop a new method of depositing thin films of polycrystalline silicon, utilizing an Energy Beam, for producing solar cells capable of meeting the long range economic and performance objectives of the D.O.E.'s National Photovoltaics Program. The overall process being investigated involves: 1) depositing microcrystalline silicon films on temporary (reuseable) substrates efficiently using the Energy beam, 2) grain enhancing the separated microcrystalline silicon films to produce a macrocrystalline (large grain) structure by RTR laser recrystallization, and 3) fabricating solar cells on the grain enhanced silicon films. Progress is reported.
Research Organization:
Motorola, Inc., Phoenix, AZ (USA)
OSTI ID:
6113785
Report Number(s):
SAN-1287-2
Country of Publication:
United States
Language:
English