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U.S. Department of Energy
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Comparison of metallization systems for thin film hybrid microcircuits. Part II. Corrosion susceptibility and solderability

Conference ·
OSTI ID:5688692
Corrosion susceptibility and solderability were evaluated for thin film Cr/Pd/Au, Ti/Pd/Au, and the currently used evaporated chromium/gold system. Both evaporated and electroplated gold were included in the Cr/Pd/Au and Ti/Pd/Au samples. For the corrosion susceptibility evaluation, circuits from each system were exposed to various solutions used in the fabrication process, and the percent change in interface resistance was measured as a function of time. For the solderability evaluation, solder filled via resistance and solder bond strengths were measured after temperature cycling. The electroplated gold systems with a palladium layer showed better corrosion resistance and solderability than evaporated chromium/gold.
Research Organization:
Bendix Corp., Kansas City, MO (USA)
DOE Contract Number:
EY-76-C-04-0613
OSTI ID:
5688692
Report Number(s):
BDX-613-2336; CONF-800118-1
Country of Publication:
United States
Language:
English