Amorphous diamond films

Patent · Thu Jan 01 00:00:00 EST 1998

OSTI ID:871607

Falabella, Steven ^[1]

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1. Livermore, CA

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5763087
• OSTI ID: 871607
• Country of Publication: United States
• Language: English

Related Subjects

amorphous
diamond
films
significant
reduction
intrinsic
stress
prepared
biasing
substrate
coated
depositing
carbon
thereon
controlled
temperature
conditions
amorphous diamond
temperature conditions
controlled temperature
significant reduction
diamond film
diamond films
depositing carbon
intrinsic stress
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