Fabrication of amorphous diamond films
Patent
·
OSTI ID:170486
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.
- Research Organization:
- University of California
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Univ. of California, Oakland, CA (United States)
- Patent Number(s):
- US 5,474,816/A/
- Application Number:
- PAN: 8-047,176
- OSTI ID:
- 170486
- Country of Publication:
- United States
- Language:
- English
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