Fabrication of amorphous diamond films

Patent · Tue Dec 12 00:00:00 EST 1995

OSTI ID:170486

Falabella, S

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.

• Research Organization: Univ. of California (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Univ. of California, Oakland, CA (United States)
• Patent Number(s): US 5,474,816/A/
• Application Number: PAN: 8-047,176
• OSTI ID: 170486
• Resource Relation: Other Information: PBD: 12 Dec 1995
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DIAMONDS
SURFACE COATING
AMORPHOUS STATE
TEMPERATURE CONTROL
CONTROLLED ATMOSPHERES