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U.S. Department of Energy
Office of Scientific and Technical Information

Amorphous diamond films

Patent ·
OSTI ID:871607
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 5763087
OSTI ID:
871607
Country of Publication:
United States
Language:
English