Amorphous diamond films
Patent
·
OSTI ID:871607
- Livermore, CA
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5763087
- OSTI ID:
- 871607
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/428/51/423/
amorphous
amorphous diamond
biasing
carbon
coated
conditions
controlled
controlled temperature
depositing
depositing carbon
diamond
diamond film
diamond films
films
intrinsic
intrinsic stress
prepared
reduction
significant
significant reduction
stress
substrate
temperature
temperature conditions
thereon
amorphous
amorphous diamond
biasing
carbon
coated
conditions
controlled
controlled temperature
depositing
depositing carbon
diamond
diamond film
diamond films
films
intrinsic
intrinsic stress
prepared
reduction
significant
significant reduction
stress
substrate
temperature
temperature conditions
thereon