Sputter target

Patent · Tue Jan 01 00:00:00 EST 1980

OSTI ID:863599

Gates, Willard G ^[1]; Hale, Gerald J ^[2]

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1. Kansas City, MO
2. Overland Park, KS

The disclosure relates to an improved sputter target for use in the deposition of hard coatings. An exemplary target is given wherein titanium diboride is brazed to a tantalum backing plate using a gold-palladium-nickel braze alloy.

• Research Organization: Bendix Corp., Kansas City, MO (United States)
• DOE Contract Number: EY-76-C-04-0613
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4209375
• OSTI ID: 863599
• Country of Publication: United States
• Language: English

Related Subjects

sputter
target
disclosure
relates
improved
deposition
hard
coatings
exemplary
titanium
diboride
brazed
tantalum
plate
gold-palladium-nickel
braze
alloy
braze alloy
titanium diboride
disclosure relates
sputter target
hard coatings
hard coating
/204/428/