Sputter target
Patent
·
OSTI ID:5203937
The disclosure relates to an improved sputter target for use in the deposition of hard coatings. An exemplary target is given wherein titanium diboride is brazed to a tantalum backing plate using a gold-palladium-nickel braze alloy. 8 claims.
- Assignee:
- Dept. of Energy
- Patent Number(s):
- US 4209375
- OSTI ID:
- 5203937
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360103 -- Metals & Alloys-- Mechanical Properties
ALLOYS
BORIDES
BORON COMPOUNDS
BRAZING
BRAZING ALLOYS
FABRICATION
GOLD ALLOYS
HARD FACING
JOINING
MECHANICAL PROPERTIES
NICKEL ALLOYS
PALLADIUM ALLOYS
PLATINUM METAL ALLOYS
TITANIUM BORIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
WEAR RESISTANCE
WELDING
360101* -- Metals & Alloys-- Preparation & Fabrication
360103 -- Metals & Alloys-- Mechanical Properties
ALLOYS
BORIDES
BORON COMPOUNDS
BRAZING
BRAZING ALLOYS
FABRICATION
GOLD ALLOYS
HARD FACING
JOINING
MECHANICAL PROPERTIES
NICKEL ALLOYS
PALLADIUM ALLOYS
PLATINUM METAL ALLOYS
TITANIUM BORIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
WEAR RESISTANCE
WELDING