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Sputter target

Patent ·
OSTI ID:863599
 [1];  [2]
  1. Kansas City, MO
  2. Overland Park, KS
+ Show Author Affiliations
The disclosure relates to an improved sputter target for use in the deposition of hard coatings. An exemplary target is given wherein titanium diboride is brazed to a tantalum backing plate using a gold-palladium-nickel braze alloy.
Research Organization:
Bendix Corp., Kansas City, MO (USA)
DOE Contract Number:
EY-76-C-04-0613
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4209375
OSTI ID:
863599
Country of Publication:
United States
Language:
English

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Related Subjects

/204/428/
alloy
braze
braze alloy
brazed
coatings
deposition
diboride
disclosure
disclosure relates
exemplary
gold-palladium-nickel
hard
hard coating
hard coatings
improved
plate
relates
sputter
sputter target
tantalum
target
titanium
titanium diboride