High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair

Journal Article · Tue Feb 04 00:00:00 EST 2020 · Journal of Microelectromechanical Systems

DOI:https://doi.org/10.1109/jmems.2020.2967794· OSTI ID:1799481

Mahdavi, Mohammad  ^[1]; Coskun, M. Bulut  ^[2]; Moheimani, S. Reza  ^[1]

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1. Univ. of Texas at Dallas, Richardson, TX (United States)
2. Univ. of Texas at Dallas, Richardson, TX (United States); California Institute of Technology (CalTech), Pasadena, CA (United States). Jet Propulsion Lab. (JPL)

We present a novel approach to fundamentally eliminate electrical feedthrough (cross-talk) signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force microscopy (AFM). The probe is an Si microcantilever on which a two-layer piezoelectric stack transducer is microfabricated. The top transducer in the stack functions as an actuator, while the bottom transducer is used as a deflection sensor. This arrangement leads to a collocated actuator-sensor pair that co-exist on the same surface area. We report experimental results that establish the sensor's ability to capture the full dynamic range of the cantilever with minimal feedthrough from the actuator.

• Research Organization: Univ. of Texas at Dallas, Richardson, TX (United States)
• Sponsoring Organization: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office
• Grant/Contract Number: EE0008322
• OSTI ID: 1799481
• Journal Information: Journal of Microelectromechanical Systems, Vol. 29, Issue 2; ISSN 1057-7157
• Publisher: IEEE
• Country of Publication: United States
• Language: English

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