AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging

Mahdavi, Mohammad; Nikooienejad, Nastaran; Moheimani, S. Reza

doi:10.1109/jmems.2020.3011826

AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging

Journal Article · Fri Jul 31 00:00:00 EDT 2020 · Journal of Microelectromechanical Systems

DOI:https://doi.org/10.1109/jmems.2020.3011826· OSTI ID:1768377

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Univ. of Texas at Dallas, Richardson, TX (United States); The University of Texas at Dallas
Univ. of Texas at Dallas, Richardson, TX (United States)

This manuscript presents a novel microcantilever with an embedded piezoelectric sensor-actuator pair for dynamic atomic force microscopy (AFM). The transducer pair is constructed from a two-layered AlN stack. Stacking the piezoelectric transducers in this manner leads to a minimal feedthrough from actuation to sense electrode, granting a high dynamic range frequency response for dynamic mode AFM. The cantilever's design allows for dual mode operation at 1 ^st and 2 ^nd resonance modes. High resolution tapping mode imaging results are reported, while the cantilever is operated at these modes. A feedback control loop is used to modify quality factor of the 1 ^st mode of the cantilever, using a positive position feedback (PPF) controller. Here, a faster response time is achieved by reducing the Q-factor, enabling the cantilever to track the topography at a higher scan rate. Results of bimodal AFM imaging are reported, using amplitude changes of the 1 ^st mode for surface topography, while material properties are encoded in phase changes of the 2 ^nd mode.

Research Organization:: Univ. of Texas at Dallas, Richardson, TX (United States); Zyvex Labs, LLC, Richardson, TX (United States); National Inst. of Standards and Technology (NIST), Boulder, CO (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office

Grant/Contract Number:: EE0008322

OSTI ID:: 1768377

Journal Information:: Journal of Microelectromechanical Systems, Journal Name: Journal of Microelectromechanical Systems Journal Issue: 5 Vol. 29; ISSN 1057-7157

Publisher:: IEEECopyright Statement

Country of Publication:: United States

Language:: English

References (11)

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47 OTHER INSTRUMENTATION
Atomic force microscopy (AFM)
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active microcantilever
dynamic range
microelectromechanical system (MEMS)
tapping mode AFM

AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging

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