Modal Actuation and Sensing With an Active AFM Cantilever

Mahdavi, Mohammad; Nasrabadi, Hazhir Mahmoodi; Soleymaniha, Mohammadreza; Moheimani, S. O. Reza

doi:10.1109/jsen.2021.3052855

Modal Actuation and Sensing With an Active AFM Cantilever

Journal Article · Mon Jan 18 23:00:00 EST 2021 · IEEE Sensors Journal

DOI:https://doi.org/10.1109/jsen.2021.3052855· OSTI ID:1901410

^[1]; ^[2]; Soleymaniha, Mohammadreza ^[2]; ^[2]

Univ. of Texas at Dallas, Richardson, TX (United States); University of Texas at Dallas
Univ. of Texas at Dallas, Richardson, TX (United States)

Modal actuation and sensing are implemented on a microfabricated AFM cantilever with a two-layer piezoelectric stack transducer. The top transducer is shaped as the second derivative of the first mode shape. The bottom transducer is uniformly distributed along the cantilever length. The purpose of this work is to demonstrate that modal actuation and sensing can be used to eliminate other resonances from frequency response function of the active cantilever, except the first mode. First-order mathematical formulations are presented to model transverse vibrations of the cantilevers under this study. Microfabrication steps and characterization of these cantilevers are reported. Their respective actuation and sensing gains are determined for comparison with conventional active cantilevers. Electromechanical coupling coefficients are also calculated to exhibit reciprocity of modal actuation and sensing in eliminating higher modes from the frequency response. Furthermore, the advantages of modal actuation and sensing in avoiding instabilities in feedback controlled AFM active cantilevers are also demonstrated.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Texas at Dallas, Richardson, TX (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office

Grant/Contract Number:: EE0008322

OSTI ID:: 1901410

Alternate ID(s):: OSTI ID: 1848735

Journal Information:: IEEE Sensors Journal, Journal Name: IEEE Sensors Journal Journal Issue: 7 Vol. 21; ISSN 1530-437X

Publisher:: IEEECopyright Statement

Country of Publication:: United States

Language:: English

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42 ENGINEERING
active microcantilever
atomic force microscopy
microelectromechanical systems
microfabrication
modal actuation
modal sensing
piezoelectric devices

Modal Actuation and Sensing With an Active AFM Cantilever

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