Spectroscopic ellipsometry extraction of optical constants for materials from oxide covered samples: Application to the plutonium/oxides system

Dinh, L. N.; Stanford, J. A.; Saw, C. K.; Nelson, A. J.; Gollott, R.; Haschke, J. M.; Allen, P. G.; Gardner, C.; Hrousis, C.; Siekhaus, W. J.; McLean, W.

doi:10.1063/1.5092129

Title: Spectroscopic ellipsometry extraction of optical constants for materials from oxide covered samples: Application to the plutonium/oxides system

Journal Article · Tue May 14 00:00:00 EDT 2019 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.5092129· OSTI ID:1525732

Dinh, L. N. ^[1]; Stanford, J. A. ^[1]; Saw, C. K. ^[1]; Nelson, A. J. ^[1]; Gollott, R. ^[1]; Haschke, J. M. ^[1]; Allen, P. G. ^[1]; Gardner, C. ^[1]; Hrousis, C. ^[1]; Siekhaus, W. J. ^[1]; McLean, W. ^[1]

Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Spectroscopic ellipsometry is combined with scanning electron microscopy and multisample analysis of the measured oxide thickness difference from one sample at two different times during the oxide growth phase or from two separate samples to obtain the optical constants of the oxides. With the obtained thickness and optical constants of the oxides, the optical properties of the substrate material can be uniquely deduced. This methodology has been applied to obtain, the refractive indices and extinction coefficients of delta plutonium (δ-Pu) metal with 0.5 wt. % Ga in the wavelength region from 435 nm to 850 nm, without the influence of surface oxides. Lastly, the presented methodology can also be applied to metals and semiconductors from surface oxidized samples, even when the oxides do not possess a common set of optical characteristics.

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Research Organization:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC52-07NA27344; AC52-07NA27344.

OSTI ID:: 1525732

Alternate ID(s):: OSTI ID: 1512338

Report Number(s):: LLNL-JRNL-765182; 955186

Journal Information:: Journal of Applied Physics, Vol. 125, Issue 18; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 3 works

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References (18)

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