Optical constants of Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} measured using spectroscopic ellipsometry
In this work, the authors present the optical constants of bismuth telluride (Bi{sub 2}Te{sub 3}), and antimony telluride (Sb{sub 2}Te{sub 3}) determined using spectroscopic ellipsometry (SE). The spectral range of the optical constants is from 404 nm to 740 nm. Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} films with different thicknesses were grown by metal organic chemical vapor deposition (MOCVD). Multiple sample analysis (MSA) technique was employed in order to eliminate the parameter correlation in the SE data analysis caused by the presence of the overlayer on top of Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} films. Optical constants and thicknesses for both Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} overlayers were also determined. Independent Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} samples were used to check the results obtained. In addition, SE analysis was performed on two Sb{sub 2}Te{sub 3} samples after being etched in diluted NH{sub 4}OH solution in order to characterize the overlayer and confirm the reliability of the results.
- Research Organization:
- Rensselaer Polytechnic Inst., Troy, NY (US)
- OSTI ID:
- 20000472
- Journal Information:
- Journal of Electronic Materials, Vol. 28, Issue 10; Other Information: PBD: Oct 1999; ISSN 0361-5235
- Country of Publication:
- United States
- Language:
- English
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