Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity

Journal Article · Mon Jun 12 00:00:00 EDT 2017 · Applied Optics

DOI:https://doi.org/10.1364/AO.56.005121· OSTI ID:1372102

Oliver, J. B. ^[1]

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1. Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics

Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.

• Research Organization: Univ. of Rochester, NY (United States). Lab. for Laser Energetics
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• Grant/Contract Number: NA0001944
• OSTI ID: 1372102
• Alternate ID(s): OSTI ID: 1361946
• Journal Information: Applied Optics, Vol. 56, Issue 18; ISSN 0003-6935
• Publisher: Optical Society of America (OSA)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
deposition and fabrication
materials and process characterization