Impact of deposition-rate fluctuations on thin-film thickness and uniformity
- Univ. of Rochester, Rochester, NY (United States); Laboratory for Laser Energetics, University of Rochester
Variations in deposition rate are superimposed on a thin-film–deposition model with planetary rotation to determine the impact on film thickness. Variations in magnitude and frequency of the fluctuations relative to the speed of planetary revolution lead to thickness errors and uniformity variations up to 3%. Sufficiently rapid oscillations in the deposition rate have a negligible impact, while slow oscillations are found to be problematic, leading to changes in the nominal film thickness. Finally, superimposing noise as random fluctuations in the deposition rate has a negligible impact, confirming the importance of any underlying harmonic oscillations in deposition rate or source operation.
- Research Organization:
- Univ. of Rochester, Rochester, NY (United States). Laboratory for Laser Energetics
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- Contributing Organization:
- Laboratory for Laser Energetics, University of Rochester
- Grant/Contract Number:
- NA0001944
- OSTI ID:
- 1342091
- Alternate ID(s):
- OSTI ID: 1330734
- Report Number(s):
- 1318; 2016-200; 1318; 2274
- Journal Information:
- Optics Letters, Journal Name: Optics Letters Journal Issue: 22 Vol. 41; ISSN 0146-9592; ISSN OPLEDP
- Publisher:
- Optical Society of America (OSA)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
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