Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings

Journal Article · Wed Feb 08 00:00:00 EST 2017 · Applied Optics

DOI:https://doi.org/10.1364/AO.56.001460· OSTI ID:1347440

Oliver, J. B. ^[1]

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1. Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics; Laboratory for Laser Energetics, University of Rochester

Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Furthermore, guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.

• Research Organization: Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• Contributing Organization: Laboratory for Laser Energetics, University of Rochester
• Grant/Contract Number: NA0001944
• OSTI ID: 1347440
• Alternate ID(s): OSTI ID: 1342619
• Report Number(s): 1321; 2016-223; 2016-223; 2276; 1321
• Journal Information: Applied Optics, Journal Name: Applied Optics Journal Issue: 5 Vol. 56; ISSN APOPAI; ISSN 0003-6935
• Publisher: Optical Society of America (OSA)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
deposition and fabrication
materials and process characterization