Impact of deposition-rate fluctuations on thin-film thickness and uniformity
- Univ. of Rochester, Rochester, NY (United States)
Variations in deposition rate are superimposed on a thin-film–deposition model with planetary rotation to determine the impact on film thickness. Variations in magnitude and frequency of the fluctuations relative to the speed of planetary revolution lead to thickness errors and uniformity variations up to 3%. Sufficiently rapid oscillations in the deposition rate have a negligible impact, while slow oscillations are found to be problematic, leading to changes in the nominal film thickness. Finally, superimposing noise as random fluctuations in the deposition rate has a negligible impact, confirming the importance of any underlying harmonic oscillations in deposition rate or source operation.
- Research Organization:
- Univ. of Rochester, NY (United States). Lab. for Laser Energetics
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- Contributing Organization:
- Laboratory for Laser Energetics, University of Rochester
- Grant/Contract Number:
- NA0001944
- OSTI ID:
- 1342091
- Alternate ID(s):
- OSTI ID: 1330734
- Report Number(s):
- 1318; OPLEDP; 2016-200; 1318; 2274
- Journal Information:
- Optics Letters, Vol. 41, Issue 22; ISSN 0146-9592
- Publisher:
- Optical Society of America (OSA)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 7 works
Citation information provided by
Web of Science
Web of Science
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