On-chip and freestanding elastic carbon films for micro-supercapacitors

Huang, Peihua; Lethien, C.; Pinaud, S.; Brousse, K.; Laloo, R.; Turq, V.; Respaud, M.; Demortiere, A.; Daffos, B.; Taberna, Pierre -Louis; Chaudret, B.; Gogotsi, Yury G.; Simon, Patrice

doi:10.1126/science.aad3345

Title: On-chip and freestanding elastic carbon films for micro-supercapacitors

Journal Article · Thu Feb 11 00:00:00 EST 2016 · Science

DOI:https://doi.org/10.1126/science.aad3345· OSTI ID:1346630

Huang, Peihua ^[1]; Lethien, C. ^[2]; Pinaud, S. ^[3]; Brousse, K. ^[1]; Laloo, R. ^[1]; Turq, V. ^[1]; Respaud, M. ^[4]; Demortiere, A. ^[5]; Daffos, B. ^[1]; Taberna, Pierre -Louis ^[1]; Chaudret, B. ^[3]; Gogotsi, Yury G. ^[6]; Simon, Patrice ^[1]

Univ. Paul Sabatier-Toulouse III, Toulouse (France); Reseau sur le Stockage Electrochimique de l'Energie (France)
Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. Lille 1 Science et Technologies, Villeneuve d'Ascq cedex (France)
Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France)
Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France); Univ. de Toulouse, Toulouse Cedex (France)
Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. de Picardie Jules Verne, Amiens (France)
Drexel Univ., Philadelphia, PA (United States)

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1346630

Journal Information:: Science, Vol. 351, Issue 6274; ISSN 0036-8075

Publisher:: AAASCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 542 works

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Novel insights into the charge storage mechanism in pseudocapacitive vanadium nitride thick films for high-performance on-chip micro-supercapacitors Robert, Kevin; Stiévenard, Didier; Deresmes, Dominique Energy & Environmental Science, Vol. 13, Issue 3 https://doi.org/10.1039/c9ee03787j	journal	January 2020
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Designing Carbon Based Supercapacitors with High Energy Density: A Summary of Recent Progress Han, Yi; Lai, Zhengzhe; Wang, Zifan Chemistry – A European Journal, Vol. 24, Issue 29 https://doi.org/10.1002/chem.201705555	journal	February 2018
Flexible micro-supercapacitors assembled via chemically reduced graphene oxide films assisted by a laser printer Zhong, Min; Zhang, Fangwei; Yu, Youyi Nanotechnology, Vol. 29, Issue 43 https://doi.org/10.1088/1361-6528/aad886	journal	August 2018
Titanium dioxide nanotrees for high-capacity lithium-ion microbatteries Wen, Wei; Wu, Jin-Ming; Jiang, Yin-Zhu Journal of Materials Chemistry A, Vol. 4, Issue 27 https://doi.org/10.1039/c6ta03331h	journal	January 2016
Vertically Aligned Niobium Nanowire Arrays for Fast-Charging Micro-Supercapacitors Mirvakili, Seyed M.; Hunter, Ian W. Advanced Materials, Vol. 29, Issue 27 https://doi.org/10.1002/adma.201700671	journal	May 2017
All-solid-state flexible planar lithium ion micro-capacitors Zheng, Shuanghao; Ma, Jiaming; Wu, Zhong-Shuai Energy & Environmental Science, Vol. 11, Issue 8 https://doi.org/10.1039/c8ee00855h	journal	January 2018
Hierarchical Porous Carbon Derived from Sichuan Pepper for High-Performance Symmetric Supercapacitor with Decent Rate Capability and Cycling Stability Zhang, Hengshuo; Xiao, Wei; Zhou, Wenjie Nanomaterials, Vol. 9, Issue 4 https://doi.org/10.3390/nano9040553	journal	April 2019
High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes Eustache, Etienne; Douard, Camille; Demortière, Arnaud Advanced Materials Technologies, Vol. 2, Issue 10 https://doi.org/10.1002/admt.201700126	journal	August 2017
Design and integration of flexible planar micro-supercapacitors Liu, Lili; Niu, Zhiqiang; Chen, Jun Nano Research, Vol. 10, Issue 5 https://doi.org/10.1007/s12274-017-1448-z	journal	January 2017
A Dendritic Nickel Cobalt Sulfide Nanostructure for Alkaline Battery Electrodes Li, Wenyao; Zhang, Bingjie; Lin, Runjia Advanced Functional Materials, Vol. 28, Issue 23 https://doi.org/10.1002/adfm.201705937	journal	April 2018
Design of Architectures and Materials in In-Plane Micro-supercapacitors: Current Status and Future Challenges Qi, Dianpeng; Liu, Yan; Liu, Zhiyuan Advanced Materials, Vol. 29, Issue 5 https://doi.org/10.1002/adma.201602802	journal	November 2016
All Pseudocapacitive MXene-RuO ₂ Asymmetric Supercapacitors Jiang, Qiu; Kurra, Narendra; Alhabeb, Mohamed Advanced Energy Materials, Vol. 8, Issue 13 https://doi.org/10.1002/aenm.201703043	journal	January 2018
The Road Towards Planar Microbatteries and Micro‐Supercapacitors: From 2D to 3D Device Geometries Zheng, Shuanghao; Shi, Xiaoyu; Das, Pratteek Advanced Materials https://doi.org/10.1002/adma.201900583	journal	June 2019
Asymmetric Flexible MXene-Reduced Graphene Oxide Micro-Supercapacitor Couly, Cedric; Alhabeb, Mohamed; Van Aken, Katherine L. Advanced Electronic Materials, Vol. 4, Issue 1 https://doi.org/10.1002/aelm.201700339	journal	November 2017
Hollow TiN nanotrees derived from a surface-induced Kirkendall effect and their application in high-power supercapacitors Wen, Wei; Yao, Jincheng; Tan, Hua Journal of Materials Chemistry A, Vol. 7, Issue 37 https://doi.org/10.1039/c9ta07642e	journal	January 2019
Scalable Production of Graphene Inks via Wet‐Jet Milling Exfoliation for Screen‐Printed Micro‐Supercapacitors Bellani, Sebastiano; Petroni, Elisa; Del Rio Castillo, Antonio Esau Advanced Functional Materials, Vol. 29, Issue 14 https://doi.org/10.1002/adfm.201807659	journal	February 2019
Recent Progress in Micro‐Supercapacitor Design, Integration, and Functionalization Wang, Jinhui; Li, Fei; Zhu, Feng Small Methods https://doi.org/10.1002/smtd.201800367	journal	December 2018
High Power In-Plane Micro-Supercapacitors Based on Mesoporous Polyaniline Patterned Graphene Liu, Zhaoyang; Liu, Shaohua; Dong, Renhao Small, Vol. 13, Issue 14 https://doi.org/10.1002/smll.201603388	journal	February 2017
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Unconventional supercapacitors from nanocarbon-based electrode materials to device configurations Liu, Lili; Niu, Zhiqiang; Chen, Jun Chemical Society Reviews, Vol. 45, Issue 15 https://doi.org/10.1039/c6cs00041j	journal	January 2016
Ionogel-based sodium ion micro-batteries with a 3D Na-ion diffusion mechanism enable ultrahigh rate capability Zheng, Shuanghao; Huang, Huijuan; Dong, Yanfeng Energy & Environmental Science, Vol. 13, Issue 3 https://doi.org/10.1039/c9ee03219c	journal	January 2020
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Surface-coating synthesis of nitrogen-doped inverse opal carbon materials with ultrathin micro/mesoporous graphene-like walls for oxygen reduction and supercapacitors Yao, Yan; Chen, Zhi; Zhang, Aijian Journal of Materials Chemistry A, Vol. 5, Issue 48 https://doi.org/10.1039/c7ta08354h	journal	January 2017
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Designed formation of hollow particle-based nitrogen-doped carbon nanofibers for high-performance supercapacitors Chen, Li-Feng; Lu, Yan; Yu, Le Energy & Environmental Science, Vol. 10, Issue 8 https://doi.org/10.1039/c7ee00488e	journal	January 2017
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Flexible Fiber and Fabric Batteries Zhang, Chenjun; Zhu, Jixin; Lin, Huijuan Advanced Materials Technologies, Vol. 3, Issue 10 https://doi.org/10.1002/admt.201700302	journal	February 2018
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On‐Chip MXene Microsupercapacitors for AC‐Line Filtering Applications Jiang, Qiu; Kurra, Narendra; Maleski, Kathleen Advanced Energy Materials https://doi.org/10.1002/aenm.201901061	journal	May 2019
3D printed graphene/nickel electrodes for high areal capacitance electrochemical storage Li, Guijun; Mo, Xiaoyong; Law, Wing-Cheung Journal of Materials Chemistry A, Vol. 7, Issue 8 https://doi.org/10.1039/c8ta11121a	journal	January 2019
Multidimensional materials and device architectures for future hybrid energy storage Lukatskaya, Maria R.; Dunn, Bruce; Gogotsi, Yury Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms12647	journal	September 2016
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MXene-on-Paper Coplanar Microsupercapacitors Kurra, Narendra; Ahmed, Bilal; Gogotsi, Yury Advanced Energy Materials, Vol. 6, Issue 24 https://doi.org/10.1002/aenm.201601372	journal	September 2016
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Hybrid Microsupercapacitors with Vertically Scaled 3D Current Collectors Fabricated using a Simple Cut-and-Transfer Strategy Jiang, Qiu; Kurra, Narendra; Xia, Chuan Advanced Energy Materials, Vol. 7, Issue 1 https://doi.org/10.1002/aenm.201601257	journal	September 2016
NiO/Ni _x Co _3−x O ₄ porous ultrathin nanosheet/nanowire composite structures as high-performance supercapacitor electrodes Jiang, Dongkai; Zheng, Maojun; You, Yuxiu RSC Advances, Vol. 8, Issue 56 https://doi.org/10.1039/c8ra04827d	journal	January 2018
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Ultrahigh‐Areal‐Capacitance Flexible Supercapacitor Electrodes Enabled by Conformal P3MT on Horizontally Aligned Carbon‐Nanotube Arrays Zhou, Yue; Wang, Xiaoxue; Acauan, Luiz Advanced Materials https://doi.org/10.1002/adma.201901916	journal	June 2019
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Metal–organic framework derived hollow materials for electrochemical energy storage Xie, Xing-Chen; Huang, Ke-Jing; Wu, Xu Journal of Materials Chemistry A, Vol. 6, Issue 16 https://doi.org/10.1039/c8ta00612a	journal	January 2018
All‐Solid‐State Planar Sodium‐Ion Microcapacitors with Multidirectional Fast Ion Diffusion Pathways Zheng, Shuanghao; Wang, Sen; Dong, Yanfeng Advanced Science, Vol. 6, Issue 23 https://doi.org/10.1002/advs.201902147	journal	September 2019
Sticky-note supercapacitors Cao, Jingyu; Zhao, Yang; Xu, Yifan Journal of Materials Chemistry A, Vol. 6, Issue 8 https://doi.org/10.1039/c7ta10756k	journal	January 2018
Rich-Mixed-Valence Ni _x Co _3−x P _y Porous Nanowires Interwelded Junction-Free 3D Network Architectures for Ultrahigh Areal Energy Density Supercapacitors Song, Weijie; Wu, Juan; Wang, Gengjie Advanced Functional Materials, Vol. 28, Issue 46 https://doi.org/10.1002/adfm.201804620	journal	September 2018
Coordination Polymer Framework Based On-Chip Micro-Supercapacitors with AC Line-Filtering Performance Yang, Chongqing; Schellhammer, Karl Sebastian; Ortmann, Frank Angewandte Chemie International Edition, Vol. 56, Issue 14 https://doi.org/10.1002/anie.201700679	journal	March 2017
Flexible Ti ₃ C ₂ T _x @Al electrodes with Ultrahigh Areal Capacitance: In Situ Regulation of Interlayer Conductivity and Spacing Guo, Miao; Liu, Chengbin; Zhang, Zezhong Advanced Functional Materials, Vol. 28, Issue 37 https://doi.org/10.1002/adfm.201803196	journal	July 2018
Microfluidic‐Architected Nanoarrays/Porous Core–Shell Fibers toward Robust Micro‐Energy‐Storage Meng, Jinku; Wu, Guan; Wu, Xingjiang Advanced Science, Vol. 7, Issue 1 https://doi.org/10.1002/advs.201901931	journal	November 2019
Nanoelectrode design from microminiaturized honeycomb monolith with ultrathin and stiff nanoscaffold for high-energy micro-supercapacitors Lei, Zhendong; Liu, Long; Zhao, Huaping Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-019-14170-6	journal	January 2020
3D porous binary-heteroatom doped carbon nanosheet/electrochemically exfoliated graphene hybrids for high performance flexible solid-state supercapacitors Liu, Yuxi; Qiu, Xiaoming; Liu, Xiaobin Journal of Materials Chemistry A, Vol. 6, Issue 18 https://doi.org/10.1039/c8ta01148f	journal	January 2018
Gated ion transport through layered graphene oxide membranes Yang, Jinlei; Zhu, Weiwei; Zhang, Xiaopeng New Journal of Chemistry, Vol. 43, Issue 19 https://doi.org/10.1039/c9nj00460b	journal	January 2019
High performance microsupercapacitors based on a nano-micro hierarchical carbon electrode by direct laser writing Kwon, Soongeun; Kim, Geehong; Lim, Hyungjun Applied Physics Letters, Vol. 113, Issue 24 https://doi.org/10.1063/1.5066017	journal	December 2018
A High-Performance Sodium-Ion Hybrid Capacitor Constructed by Metal-Organic Framework-Derived Anode and Cathode Materials Li, Hongxia; Lang, Junwei; Lei, Shulai Advanced Functional Materials, Vol. 28, Issue 30 https://doi.org/10.1002/adfm.201800757	journal	May 2018
A Flexible Quasi‐Solid‐State Bifunctional Device with Zinc‐Ion Microbattery and Photodetector Bi, Songshan; Wan, Fang; Huang, Shuo ChemElectroChem, Vol. 6, Issue 15 https://doi.org/10.1002/celc.201900966	journal	May 2019
Two-dimensional materials for miniaturized energy storage devices: from individual devices to smart integrated systems Zhang, Panpan; Wang, Faxing; Yu, Minghao Chemical Society Reviews, Vol. 47, Issue 19 https://doi.org/10.1039/c8cs00561c	journal	January 2018
Fully inkjet printed ultrathin microsupercapacitors based on graphene electrodes and a nano-graphene oxide electrolyte Sollami Delekta, Szymon; Adolfsson, Karin H.; Benyahia Erdal, Nejla Nanoscale, Vol. 11, Issue 21 https://doi.org/10.1039/c9nr01427f	journal	January 2019
Energy storage: The future enabled by nanomaterials Pomerantseva, Ekaterina; Bonaccorso, Francesco; Feng, Xinliang Science, Vol. 366, Issue 6468 https://doi.org/10.1126/science.aan8285	journal	November 2019
All‐Solid‐State On‐Chip Supercapacitors Based on Free‐Standing 4 H ‐SiC Nanowire Arrays Li, Weijun; Liu, Qiao; Fang, Zhi Advanced Energy Materials, Vol. 9, Issue 17 https://doi.org/10.1002/aenm.201900073	journal	March 2019
Coordination Polymer Framework Based On-Chip Micro-Supercapacitors with AC Line-Filtering Performance Yang, Chongqing; Schellhammer, Karl Sebastian; Ortmann, Frank Angewandte Chemie, Vol. 129, Issue 14 https://doi.org/10.1002/ange.201700679	journal	March 2017
Micro-supercapacitors based on oriented coordination polymer thin films for AC line-filtering Hua, Weiwei; Xiu, Jingwei; Xiu, Fei RSC Advances, Vol. 8, Issue 53 https://doi.org/10.1039/c8ra06474a	journal	January 2018
3D printing-based cellular microelectrodes for high-performance asymmetric quasi-solid-state micro-pseudocapacitors Wang, Teng; Tian, Xiaocong; Li, Liang Journal of Materials Chemistry A, Vol. 8, Issue 4 https://doi.org/10.1039/c9ta11386j	journal	January 2020
Study of fractal electrode designs for buckypaper-based micro-supercapacitors Huang, Kuan-Hua; Lin, Cheng-Te; Chen, Yun-Ting Journal of Applied Physics, Vol. 125, Issue 1 https://doi.org/10.1063/1.5051702	journal	January 2019
Insight into the role of interfacial reconstruction of manganese oxides toward enhanced electrochemical capacitors Zhang, Jie; Li, Wenli; Hu, Dandan Chemical Engineering Journal, Vol. 388 https://doi.org/10.1016/j.cej.2020.124293	journal	May 2020
Ultrahigh areal number density solid-state on-chip microsupercapacitors via electrohydrodynamic jet printing Lee, Kwon-Hyung; Lee, Seong-Sun; Ahn, David B. Science Advances, Vol. 6, Issue 10 https://doi.org/10.1126/sciadv.aaz1692	journal	March 2020

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