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Title: Systems and methods for forming solar cells with CuInSe.sub.2 and Cu(In,Ga)Se.sub.2 films

Patent ·
OSTI ID:1345209
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Systems and methods for forming solar cells with CuInSe.sub.2 and Cu(In,Ga)Se.sub.2 films are provided. In one embodiment, a method comprises: during a first stage (220), performing a mass transport through vapor transport of an indium chloride (InCl.sub.x) vapor (143, 223) and Se vapor (121, 225) to deposit a semiconductor film (212, 232, 252) upon a substrate (114, 210, 230, 250); heating the substrate (114, 210, 230, 250) and the semiconductor film to a desired temperature (112); during a second stage (240) following the first stage (220), performing a mass transport through vapor transport of a copper chloride (CuCl.sub.x) vapor (143, 243) and Se vapor (121, 245) to the semiconductor film (212, 232, 252); and during a third stage (260) following the second stage (240), performing a mass transport through vapor transport of an indium chloride (InCl.sub.x) vapor (143, 263) and Se vapor (121, 265) to the semiconductor film (212, 232, 252).

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-08GO28308
Assignee:
Alliance for Sustainable Energy, LLC
Patent Number(s):
9,583,667
Application Number:
14/382,106
OSTI ID:
1345209
Resource Relation:
Patent File Date: 2013 Feb 27
Country of Publication:
United States
Language:
English

References (12)

Enhanced quality thin film Cu(In,Ga)Se.sub.2 for semiconductor device applications by vapor-phase recrystallization patent October 1994
Recrystallization method to selenization of thin-film Cu(In,Ga)Se.sub.2 for semiconductor device applications patent July 1995
Method of fabricating high-efficiency Cu(In,Ga)(SeS).sub.2 thin films for solar cells patent August 1995
Production of films and powders for semiconductor device applications patent March 1998
Processing approach towards the formation of thin-film Cu(In,Ga)Se2 patent February 2003
Formation of CIGS absorber layer materials using atomic layer deposition and high throughput surface treatment patent December 2010
Method of manufacturing thin-film light-absorbing layer, and method of manufacturing thin-film solar cell using the same patent August 2013
Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials patent-application August 2007
Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin films patent-application December 2009
Solar Cell Absorber Layer Formed From Equilibrium Precursors patent-application September 2010
The formation of large-grain CulnSe2 films by selenization by high-rate Se transport under moderate vacuum conditions journal April 1995
Development of thin-film Cu(In,Ga)Se2 and CdTe solar cells
  • Romeo, A.; Terheggen, M.; Abou-Ras, D.
  • Progress in Photovoltaics: Research and Applications, Vol. 12, Issue 23, p. 93-111 https://doi.org/10.1002/pip.527
journal March 2004

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36 MATERIALS SCIENCE
14 SOLAR ENERGY