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Title: Patterned arrays of lateral heterojunctions within monolayer two-dimensional semiconductors

Journal Article · · Nature Communications
DOI:https://doi.org/10.1038/ncomms8749· OSTI ID:1207054
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  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science & Technology Division
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science; Escuela Politecnica Nacional, Quito (Ecuador). Dept. de Fisica

The formation of semiconductor heterojunctions and their high density integration are foundations of modern electronics and optoelectronics. To enable two-dimensional (2D) crystalline semiconductors as building blocks in next generation electronics, developing methods to deterministically form lateral heterojunctions is crucial. Here we demonstrate a process strategy for the formation of lithographically-patterned lateral semiconducting heterojunctions within a single 2D crystal. E-beam lithography is used to pattern MoSe2 monolayer crystals with SiO2, and the exposed locations are selectively and totally converted to MoS2 using pulsed laser deposition (PLD) of sulfur in order to form MoSe2/MoS2 heterojunctions in predefined patterns. The junctions and conversion process are characterized by atomically resolved scanning transmission electron microscopy, photoluminescence, and Raman spectroscopy. This demonstration of lateral semiconductor heterojunction arrays within a single 2D crystal is an essential step for the lateral integration of 2D semiconductor building blocks with different electronic and optoelectronic properties for high-density, ultrathin circuitry.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
1207054
Journal Information:
Nature Communications, Vol. 6; ISSN 2041-1723
Publisher:
Nature Publishing GroupCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 196 works
Citation information provided by
Web of Science

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Self-Aligned and Scalable Growth of Monolayer WSe 2 -MoS 2 Lateral Heterojunctions journal February 2018
Improved Electrical Contact Properties of MoS 2 ‐Graphene Lateral Heterostructure journal December 2018
Thermal Transport in 2D Semiconductors—Considerations for Device Applications journal August 2019
Engineering of the Heterointerface of Porous Carbon Nanofiber–Supported Nickel and Manganese Oxide Nanoparticle for Highly Efficient Bifunctional Oxygen Catalysis journal March 2020
Ultrathin Two‐Dimensional Multinary Layered Metal Chalcogenide Nanomaterials journal July 2017
Interface Characterization and Control of 2D Materials and Heterostructures journal July 2018
Recent Developments in Controlled Vapor‐Phase Growth of 2D Group 6 Transition Metal Dichalcogenides journal December 2018
Luminescence in 2D Materials and van der Waals Heterostructures journal March 2018
Novel Optoelectronic Devices: Transition-Metal-Dichalcogenide-Based 2D Heterostructures journal January 2018
Recent Advances in Synthesis and Applications of 2D Junctions journal August 2018
Toward High-Performance Photodetectors Based on 2D Materials: Strategy on Methods journal March 2018
Various Structures of 2D Transition-Metal Dichalcogenides and Their Applications journal July 2018
Photoexcited charge carrier behaviors in solar energy conversion systems from theoretical simulations journal August 2019
Laser Synthesis, Processing, and Spectroscopy of Atomically-Thin Two Dimensional Materials book January 2018
Misfit Strain-Induced Buckling for Transition-Metal Dichalcogenide Lateral Heterostructures: A Molecular Dynamics Study journal August 2018
Chemical vapor deposition growth of two-dimensional heterojunctions journal November 2017
Recent Advances in 2D Lateral Heterostructures journal June 2019
Epitaxial growth of hybrid nanostructures journal January 2018
A two-dimensional Fe-doped SnS2 magnetic semiconductor journal December 2017
Reconfigurable two-dimensional optoelectronic devices enabled by local ferroelectric polarization journal July 2019
General synthesis of two-dimensional van der Waals heterostructure arrays journal March 2020
Centimeter-scale Green Integration of Layer-by-Layer 2D TMD vdW Heterostructures on Arbitrary Substrates by Water-Assisted Layer Transfer journal February 2019
Strain relaxation via formation of cracks in compositionally modulated two-dimensional semiconductor alloys journal April 2018
Emerging nanofabrication and quantum confinement techniques for 2D materials beyond graphene journal July 2018
Focused helium-ion beam irradiation effects on electrical transport properties of few-layer WSe2: enabling nanoscale direct write homo-junctions journal June 2016
In-plane interfacing effects of two-dimensional transition-metal dichalcogenide heterostructures journal January 2016
Straintronics in two-dimensional in-plane heterostructures of transition-metal dichalcogenides journal January 2017
Lithography-free plasma-induced patterned growth of MoS 2 and its heterojunction with graphene journal January 2016
Spotting the differences in two-dimensional materials – the Raman scattering perspective journal January 2018
Chemical synthesis of two-dimensional atomic crystals, heterostructures and superlattices journal January 2018
Tuning electrochemical catalytic activity of defective 2D terrace MoSe 2 heterogeneous catalyst via cobalt doping journal January 2017
THz photonics in two dimensional materials and metamaterials: properties, devices and prospects journal January 2018
Composition modulation in one-dimensional and two-dimensional chalcogenide semiconductor nanostructures journal January 2018
Bithiazolidinylidene polymers: synthesis and electronic interactions with transition metal dichalcogenides journal January 2018
Recent advances in the preparation, characterization, and applications of two-dimensional heterostructures for energy storage and conversion journal January 2018
Large-scale synthesis of 2D metal dichalcogenides journal January 2018
Challenges and recent advancements of functionalization of two-dimensional nanostructured molybdenum trioxide and dichalcogenides journal January 2019
Size dependence in two-dimensional lateral heterostructures of transition metal dichalcogenides journal January 2019
Graphene and related two-dimensional materials: Structure-property relationships for electronics and optoelectronics journal June 2017
Additive manufacturing of patterned 2D semiconductor through recyclable masked growth journal February 2019
Raman spectroscopy of transition metal dichalcogenides journal July 2016
Theoretical design of blue phosphorene/arsenene lateral heterostructures with superior electronic properties journal June 2018
Lateral heterostructures and one-dimensional interfaces in 2D transition metal dichalcogenides journal March 2019
NaCl-assisted one-step growth of MoS 2 –WS 2 in-plane heterostructures journal July 2017
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2D materials advances: from large scale synthesis and controlled heterostructures to improved characterization techniques, defects and applications journal December 2016
Lateral topological crystalline insulator heterostructure journal February 2017
Two-dimensional PdSe 2 -Pd 2 Se 3 junctions can serve as nanowires journal June 2018
A roadmap for electronic grade 2D materials journal January 2019
Accelerated synthesis of atomically-thin 2D quantum materials by a novel laser-assisted synthesis technique journal November 2019
Electronic properties of two-dimensional in-plane heterostructures of WS 2 /WSe 2 /MoS 2 journal April 2018
Engineering of optical and electronic band gaps in transition metal dichalcogenide monolayers through external dielectric screening journal October 2017
Directional Motion of a Graphene Sheet on Graded MoS2–WSe2 Lateral Heterostructures journal March 2019
Dislocation-driven growth of two-dimensional lateral quantum-well superlattices journal March 2018
Robust epitaxial growth of two-dimensional heterostructures, multiheterostructures, and superlattices journal August 2017
Manufacturing strategies for wafer-scale two-dimensional transition metal dichalcogenide heterolayers journal February 2020
Nanoforging Single Layer MoSe2 Through Defect Engineering with Focused Helium Ion Beams journal August 2016

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