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Title: Individually addressable cathodes with integrated focusing stack or detectors

Patent ·
OSTI ID:1175423

Systems and method are described for addressable field emission array (AFEA) chips. A plurality of individually addressable cathodes are integrated with an electrostatic focusing stack and/or a plurality of detectors on the addressable field emission array. The systems and methods provide advantages including the avoidance of space-charge blow-up.

Research Organization:
UT-Battelle LLC, Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
Assignee:
UT-Battelle LLC (Oak Ridge, TN)
Patent Number(s):
6,917,043
Application Number:
10/260,321
OSTI ID:
1175423
Country of Publication:
United States
Language:
English

References (9)

X-ray lithography for ≤100 nm ground rules in complex patterns journal November 1997
EL5: One tool for advanced x-ray and chrome on glass mask making journal November 1998
Miniaturized e-beam writer: Testing of components journal February 1995
Electron beam technology—SEM to microcolumn journal September 1996
A review of ion projection lithography journal May 1998
Scattering with angular limitation projection electron beam lithography for suboptical lithography journal November 1997
Electron-beam microcolumns for lithography and related applications journal November 1996
Arrayed miniature electron beam columns for high throughput sub-100 nm lithography journal November 1992
Extreme ultraviolet lithography journal November 1998