Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics
X-ray microscopy is a powerful, non-invasive tool used for nanometer-scale resolution imaging, and it is widely applied in various areas of science and technology. To push the spatial resolution of x-ray microscopy studies in the hard x-ray regime below 10 nm, Multilayer Laue Lenses (MLL) can be used as nanofocusing elements. To ensure distortion-free x-ray imaging, high-stability microscopy systems are required. MEMS-based manipulators are a promising route to achieve high stability when used for alignment and manipulation of nanofocusing optics. In this work, we present a tip-tilt MEMS-based device suitable for MLL alignment. Here, we fully characterize the device and demonstrate better-than 10 millidegree angular positioning resolution when utilizing capacitive displacement sensors, and better-than 0.8 millidegree resolution when using laser interferometry.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- Grant/Contract Number:
- SC00112704; AC02-98CH10886
- OSTI ID:
- 1176975
- Alternate ID(s):
- OSTI ID: 1229267; OSTI ID: 1420675
- Report Number(s):
- BNL-111342-2015-JA
- Journal Information:
- AIP Advances, Journal Name: AIP Advances Vol. 5 Journal Issue: 3; ISSN 2158-3226
- Publisher:
- American Institute of Physics (AIP)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
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