2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy

Xu, Wei; Xu, Weihe; Bouet, Nathalie; Zhou, Juan; Yan, Hanfei; Huang, Xiaojing; Pattammattel, Ajith; Gao, Yuan; Lu, Ming; Zalalutdinov, Maxim; Chu, Yong S.; Nazaretski, Evgeny

doi:10.1364/OE.389555

Title: 2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy

Journal Article · Thu May 28 00:00:00 EDT 2020 · Optics Express

DOI:https://doi.org/10.1364/OE.389555· OSTI ID:1631185

Xu, Wei; Xu, Weihe; Bouet, Nathalie; Zhou, Juan; Yan, Hanfei; Huang, Xiaojing; Pattammattel, Ajith;

; Lu, Ming; Zalalutdinov, Maxim; Chu, Yong S.; Nazaretski, Evgeny

We report on the development of 2D integrated multilayer Laue lens (MLL) nanofocusing optics used for high-resolution x-ray microscopy. A Micro-Electro-Mechanical-Systems (MEMS) - based template has been designed and fabricated to accommodate two linear MLL optics in pre-aligned configuration. The orthogonality requirement between two MLLs has been satisfied to a better than 6 millidegrees level, and the separation along the x-ray beam direction was controlled on a micrometer scale. Developed planar 2D MLL structure has demonstrated astigmatism free point focus of ~14 nm by ~13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy. Approaching 10 nm resolution with integrated 2D MLL optic is a significant step forward in applications of multilayer Laue lenses for high-resolution hard x-ray microscopy and their adoption by the general x-ray microscopy community.

View Journal Article

Cite

Export

Save

Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: LDRD 17-017; SC0012704

OSTI ID:: 1631185

Alternate ID(s):: OSTI ID: 1644004

Report Number(s):: BNL-216205-2020-JAAM; OPEXFF

Journal Information:: Optics Express, Journal Name: Optics Express Vol. 28 Journal Issue: 12; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 4 works

Citation information provided by
Web of Science

References (31)

Optical Properties of MoSi ₂ /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device Koyama, Takahisa; Ichimaru, Satoshi; Tsuji, Takuya Applied Physics Express, Vol. 1 https://doi.org/10.1143/APEX.1.117003	journal	October 2008
Optimization of overlap uniformness for ptychography Huang, Xiaojing; Yan, Hanfei; Harder, Ross Optics Express, Vol. 22, Issue 10 https://doi.org/10.1364/OE.22.012634	journal	January 2014
Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit Evans-Lutterodt, K.; Stein, A.; Ablett, J. M. Physical Review Letters, Vol. 99, Issue 13 https://doi.org/10.1103/PhysRevLett.99.134801	journal	September 2007
Biological applications of X-ray fluorescence microscopy: exploring the subcellular topography and speciation of transition metals Fahrni, Christoph J. Current Opinion in Chemical Biology, Vol. 11, Issue 2 https://doi.org/10.1016/j.cbpa.2007.02.039	journal	April 2007
Hard x-ray nanobeam characterization by coherent diffraction microscopy Schropp, A.; Boye, P.; Feldkamp, J. M. Applied Physics Letters, Vol. 96, Issue 9 https://doi.org/10.1063/1.3332591	journal	March 2010
Multilayer Laue Lens: A Brief History and Current Status Conley, Ray; Bouet, Nathalie; Chu, Yong S. Synchrotron Radiation News, Vol. 29, Issue 4 https://doi.org/10.1080/08940886.2016.1198669	journal	July 2016
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science Yan, Hanfei; Bouet, Nathalie; Zhou, Juan Nano Futures, Vol. 2, Issue 1 https://doi.org/10.1088/2399-1984/aab25d	journal	March 2018
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses Yan, Hanfei; Rose, Volker; Shu, Deming Optics Express, Vol. 19, Issue 16 https://doi.org/10.1364/OE.19.015069	journal	January 2011
Breaking the 10 nm barrier in hard-X-ray focusing Mimura, Hidekazu; Handa, Soichiro; Kimura, Takashi Nature Physics, Vol. 6, Issue 2 https://doi.org/10.1038/nphys1457	journal	November 2009
Real space soft x-ray imaging at 10 nm spatial resolution Chao, W.; Fischer, P.; Tyliszczak, T. Optics Express, Vol. 20, Issue 9 https://doi.org/10.1364/OE.20.009777	journal	January 2012
ID16B: a hard X-ray nanoprobe beamline at the ESRF for nano-analysis Martínez-Criado, Gema; Villanova, Julie; Tucoulou, Rémi Journal of Synchrotron Radiation, Vol. 23, Issue 1 https://doi.org/10.1107/S1600577515019839	journal	January 2016
Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope Nazaretski, E.; Kim, Jungdae; Yan, H. Review of Scientific Instruments, Vol. 84, Issue 3 https://doi.org/10.1063/1.4774387	journal	March 2013
Ptychography with multilayer Laue lenses Kubec, Adam; Braun, Stefan; Niese, Sven Journal of Synchrotron Radiation, Vol. 21, Issue 5 https://doi.org/10.1107/S1600577514014556	journal	August 2014
Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam Liese, Tobias; Radisch, Volker; Krebs, Hans-Ulrich Review of Scientific Instruments, Vol. 81, Issue 7 https://doi.org/10.1063/1.3462985	journal	July 2010
Design and performance of a scanning ptychography microscope Nazaretski, E.; Huang, X.; Yan, H. Review of Scientific Instruments, Vol. 85, Issue 3 https://doi.org/10.1063/1.4868968	journal	March 2014
X-ray ptychographic computed tomography at 16 nm isotropic 3D resolution Holler, M.; Diaz, A.; Guizar-Sicairos, M. Scientific Reports, Vol. 4, Issue 1 https://doi.org/10.1038/srep03857	journal	January 2014
Multimodality hard-x-ray imaging of a chromosome with nanoscale spatial resolution Yan, Hanfei; Nazaretski, Evgeny; Lauer, Kenneth Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep20112	journal	February 2016
OMNY—A tOMography Nano crYo stage Holler, M.; Raabe, J.; Diaz, A. Review of Scientific Instruments, Vol. 89, Issue 4 https://doi.org/10.1063/1.5020247	journal	April 2018
Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens Kang, Hyon Chol; Yan, Hanfei; Winarski, Robert P. Applied Physics Letters, Vol. 92, Issue 22 https://doi.org/10.1063/1.2912503	journal	June 2008
Fabrication and efficiency measurement of a Mo/C/Si/C three material system multilayer Laue lens Kubec, A.; Maser, J.; Formánek, P. Applied Physics Letters, Vol. 110, Issue 11 https://doi.org/10.1063/1.4978610	journal	March 2017
Pushing the limits: an instrument for hard X-ray imaging below 20 nm Nazaretski, E.; Lauer, K.; Yan, H. Journal of Synchrotron Radiation, Vol. 22, Issue 2 https://doi.org/10.1107/S1600577514025715	journal	January 2015
High resolution tip-tilt positioning system for a next generation MLL-based x-ray microscope Xu, Weihe; Schlossberger, Noah; Xu, Wei Measurement Science and Technology, Vol. 28, Issue 12 https://doi.org/10.1088/1361-6501/aa8916	journal	November 2017
Chemical composition mapping with nanometre resolution by soft X-ray microscopy Shapiro, David A.; Yu, Young-Sang; Tyliszczak, Tolek Nature Photonics, Vol. 8, Issue 10 https://doi.org/10.1038/nphoton.2014.207	journal	September 2014
Optomechanical Design of a Multilayer Laue Lens Test Bed for 10-nm Focusing of Hard X-rays Shu, Deming; Nazaretski, Evgeny; Kim, Jungdae Journal of Physics: Conference Series, Vol. 463 https://doi.org/10.1088/1742-6596/463/1/012029	journal	October 2013
Design and performance of an X-ray scanning microscope at the Hard X-ray Nanoprobe beamline of NSLS-II Nazaretski, E.; Yan, H.; Lauer, K. Journal of Synchrotron Radiation, Vol. 24, Issue 6 https://doi.org/10.1107/S1600577517011183	journal	October 2017
Ptychographic phase retrieval by proximal algorithms Yan, Hanfei New Journal of Physics, Vol. 22, Issue 2 https://doi.org/10.1088/1367-2630/ab704e	journal	February 2020
Development and characterization of monolithic multilayer Laue lens nanofocusing optics Nazaretski, E.; Xu, W.; Bouet, N. Applied Physics Letters, Vol. 108, Issue 26 https://doi.org/10.1063/1.4955022	journal	June 2016
Sub-10 nm beam confinement by X-ray waveguides: design, fabrication and characterization of optical properties Krüger, S. P.; Neubauer, H.; Bartels, M. Journal of Synchrotron Radiation, Vol. 19, Issue 2 https://doi.org/10.1107/S0909049511051983	journal	January 2012
Hard x-ray nanofocusing by multilayer Laue lenses Yan, Hanfei; Conley, Ray; Bouet, Nathalie Journal of Physics D: Applied Physics, Vol. 47, Issue 26 https://doi.org/10.1088/0022-3727/47/26/263001	journal	June 2014
Point focusing with flat and wedged crossed multilayer Laue lenses Kubec, Adam; Melzer, Kathleen; Gluch, Jürgen Journal of Synchrotron Radiation, Vol. 24, Issue 2 https://doi.org/10.1107/S1600577517001722	journal	February 2017
Ultra-high resolution zone-doubled  diffractive X-ray optics for the multi-keV regime Vila-Comamala, Joan; Gorelick, Sergey; Färm, Elina Optics Express, Vol. 19, Issue 1 https://doi.org/10.1364/OE.19.000175	journal	December 2010

Similar Records

Achieving High-Resolution Hard X-ray Microscopy using Monolithic 2D Multilayer Laue Lenses

Journal Article · Tue Nov 01 00:00:00 EDT 2022 · Microscopy Today · OSTI ID:1631185

Xu, Wei; Xu, Weihe; Bouet, Nathalie; +7 more

Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy

Journal Article · Thu Oct 15 00:00:00 EDT 2020 · Micromachines · OSTI ID:1631185

Xu, Wei; Xu, Weihe; Bouet, Nathalie; +7 more

Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

Journal Article · Sun Mar 01 00:00:00 EST 2015 · AIP Advances · OSTI ID:1631185

Xu, Weihe; Lauer, Kenneth; Yan, Hui; +3 more

Related Subjects

36 MATERIALS SCIENCE

Title: 2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy

Citation Formats

References (31)

Similar Records

Related Subjects