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Achieving High-Resolution Hard X-ray Microscopy using Monolithic 2D Multilayer Laue Lenses

Journal Article · · Microscopy Today
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  1. Brookhaven National Laboratory (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  2. Brookhaven National Laboratory (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
  3. Naval Research Laboratory (NRL), Washington, DC (United States)
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This article introduces the 2D multilayer Laue lens (MLL) nanofocusing optics recently developed for high-resolution hard X-ray microscopy. The new optics utilized a micro-electro-mechanical-system (MEMS)-based template to accommodate two linear MLL optics in a pre-aligned configuration. Angular misalignment between the two lenses was controlled in tens of millidegrees, and the lateral position error was on a micrometer scale. Using the developed 2D MLLs, an astigmatism-free point focus of approximately 14 nm by 13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy was obtained. In conclusion, the success of 2D MLL optics with an approaching 10 nm resolution is a significant step forward for the development of high-resolution hard X-ray microscopy and applications of MLL optics in the hard X-ray community.
Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF)
Grant/Contract Number:
SC0012704
OSTI ID:
2204613
Report Number(s):
BNL--224965-2023-JAAM
Journal Information:
Microscopy Today, Journal Name: Microscopy Today Journal Issue: 6 Vol. 30; ISSN 1551-9295
Publisher:
Cambridge University PressCopyright Statement
Country of Publication:
United States
Language:
English

References (15)

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Design and performance of a scanning ptychography microscope journal March 2014
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Multilayer Laue Lens: A Brief History and Current Status journal July 2016
Optomechanical Design of a Multilayer Laue Lens Test Bed for 10-nm Focusing of Hard X-rays journal October 2013
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science journal March 2018
Ptychography with multilayer Laue lenses journal August 2014
Pushing the limits: an instrument for hard X-ray imaging below 20 nm journal January 2015
Point focusing with flat and wedged crossed multilayer Laue lenses journal February 2017
Design and performance of an X-ray scanning microscope at the Hard X-ray Nanoprobe beamline of NSLS-II journal October 2017
A new Kirkpatrick–Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II journal July 2022
Strain Mapping of CdTe Grains in Photovoltaic Devices journal November 2019
Three-dimensional visualization of nanoparticle lattices and multimaterial frameworks journal April 2022
Full-field X-ray microscopy with crossed partial multilayer Laue lenses journal January 2014

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Related Subjects

36 MATERIALS SCIENCE
MEMS
X-ray microscopy
microfabrication
multilayer Laue lenses
optics