Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy

Xu, Wei; Xu, Weihe; Bouet, Nathalie; Zhou, Juan; Yan, Hanfei; Huang, Xiaojing; Lu, Ming; Zalalutdinov, Maxim; Chu, Yong; Nazaretski, Evgeny

doi:10.3390/mi11100939

Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy

Journal Article · Thu Oct 15 00:00:00 EDT 2020 · Micromachines

DOI:https://doi.org/10.3390/mi11100939· OSTI ID:1677518

Xu, Wei; Xu, Weihe; ; Zhou, Juan; Yan, Hanfei; Huang, Xiaojing; ; Zalalutdinov, Maxim; Chu, Yong;

We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.

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Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1677518

Alternate ID(s):: OSTI ID: 1725765

Report Number(s):: BNL--220655-2020-JAAM; PII: mi11100939

Journal Information:: Micromachines, Journal Name: Micromachines Journal Issue: 10 Vol. 11; ISSN 2072-666X

Publisher:: MDPICopyright Statement

Country of Publication:: Switzerland

Language:: English

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