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Title: Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Abstract

We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. Furthermore, the highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

Authors:
 [1];  [2];  [2];  [2]; ORCiD logo [2]
+ Show Author Affiliations
  1. Univ. of Illinois, Urbana, IL (United States); California Institute of Technology (CalTech), Pasadena, CA (United States)
  2. Univ. of Illinois, Urbana, IL (United States)
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; NSF CAREER; USDOE
OSTI Identifier:
1875679
Alternate Identifier(s):
OSTI ID: 1226776
Grant/Contract Number:  
FG02-07ER46471
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 107; Journal Issue: 3; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Chemical vapor deposition; Optical properties; Photonic integrated circuits; Semiconductors; Optical fibers; Optical communications; Photodetectors; Photolithography; Etching; Waveguides

Citation Formats

Yu, Xin, Arbabi, Ehsan, Goddard, Lynford L., Li, Xiuling, and Chen, Xiaogang. Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration. United States: N. p., 2015. Web. doi:10.1063/1.4927243.
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Yu, Xin, Arbabi, Ehsan, Goddard, Lynford L., Li, Xiuling, & Chen, Xiaogang. Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration. United States. https://doi.org/10.1063/1.4927243
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Yu, Xin, Arbabi, Ehsan, Goddard, Lynford L., Li, Xiuling, and Chen, Xiaogang. Mon . "Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration". United States. https://doi.org/10.1063/1.4927243. https://www.osti.gov/servlets/purl/1875679.
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@article{osti_1875679,
title = {Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration},
author = {Yu, Xin and Arbabi, Ehsan and Goddard, Lynford L. and Li, Xiuling and Chen, Xiaogang},
abstractNote = {We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. Furthermore, the highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.},
doi = {10.1063/1.4927243},
journal = {Applied Physics Letters},
number = 3,
volume = 107,
place = {United States},
year = {Mon Jul 20 00:00:00 EDT 2015},
month = {Mon Jul 20 00:00:00 EDT 2015}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1063/1.4927243
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    Works referencing / citing this record:

    Rolled‐up Nanotechnology: Materials Issue and Geometry Capability
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    Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides
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    • Yu, Xin; Goddard, Lynford L.; Zhu, Jinlong
    • Applied Physics Letters, Vol. 112, Issue 2
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