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Title: Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

Abstract

Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm2 and 23 μH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [3];  [4];  [4];  [4]; ORCiD logo [2]; ORCiD logo [2];  [5]; ORCiD logo [5]; ORCiD logo [2]; ORCiD logo [2];  [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [4] more »; ORCiD logo [4]; ORCiD logo [2] « less
  1. Univ. of Illinois at Urbana, IL (United States); Hefei Univ. of Technology (China)
  2. Univ. of Illinois at Urbana, IL (United States)
  3. Stanford Univ., CA (United States); Univ. of Twente, Enschede (Netherlands)
  4. Stanford Univ., CA (United States)
  5. Hefei Univ. of Technology (China)
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation Engineering Research Center for Power Optimization of Electro-Thermal Systems (POETS); National Natural Science Foundation of China (NSFC)
OSTI Identifier:
1626042
Grant/Contract Number:  
FG02-07ER46471; 1449548; 17-01047; 61974038
Resource Type:
Accepted Manuscript
Journal Name:
Science Advances
Additional Journal Information:
Journal Volume: 6; Journal Issue: 3; Journal ID: ISSN 2375-2548
Publisher:
AAAS
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; Science & Technology - Other Topics

Citation Formats

Huang, Wen, Yang, Zhendong, Kraman, Mark D., Wang, Qingyi, Ou, Zihao, Rojo, Miguel Muñoz, Yalamarthy, Ananth Saran, Chen, Victoria, Lian, Feifei, Ni, Jimmy H., Liu, Siyu, Yu, Haotian, Sang, Lei, Michaels, Julian, Sievers, Dane J., Eden, J. Gary, Braun, Paul V., Chen, Qian, Gong, Songbin, Senesky, Debbie G., Pop, Eric, and Li, Xiuling. Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology. United States: N. p., 2020. Web. doi:10.1126/sciadv.aay4508.
Huang, Wen, Yang, Zhendong, Kraman, Mark D., Wang, Qingyi, Ou, Zihao, Rojo, Miguel Muñoz, Yalamarthy, Ananth Saran, Chen, Victoria, Lian, Feifei, Ni, Jimmy H., Liu, Siyu, Yu, Haotian, Sang, Lei, Michaels, Julian, Sievers, Dane J., Eden, J. Gary, Braun, Paul V., Chen, Qian, Gong, Songbin, Senesky, Debbie G., Pop, Eric, & Li, Xiuling. Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology. United States. https://doi.org/10.1126/sciadv.aay4508
Huang, Wen, Yang, Zhendong, Kraman, Mark D., Wang, Qingyi, Ou, Zihao, Rojo, Miguel Muñoz, Yalamarthy, Ananth Saran, Chen, Victoria, Lian, Feifei, Ni, Jimmy H., Liu, Siyu, Yu, Haotian, Sang, Lei, Michaels, Julian, Sievers, Dane J., Eden, J. Gary, Braun, Paul V., Chen, Qian, Gong, Songbin, Senesky, Debbie G., Pop, Eric, and Li, Xiuling. Fri . "Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology". United States. https://doi.org/10.1126/sciadv.aay4508. https://www.osti.gov/servlets/purl/1626042.
@article{osti_1626042,
title = {Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology},
author = {Huang, Wen and Yang, Zhendong and Kraman, Mark D. and Wang, Qingyi and Ou, Zihao and Rojo, Miguel Muñoz and Yalamarthy, Ananth Saran and Chen, Victoria and Lian, Feifei and Ni, Jimmy H. and Liu, Siyu and Yu, Haotian and Sang, Lei and Michaels, Julian and Sievers, Dane J. and Eden, J. Gary and Braun, Paul V. and Chen, Qian and Gong, Songbin and Senesky, Debbie G. and Pop, Eric and Li, Xiuling},
abstractNote = {Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm2 and 23 μH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.},
doi = {10.1126/sciadv.aay4508},
journal = {Science Advances},
number = 3,
volume = 6,
place = {United States},
year = {Fri Jan 17 00:00:00 EST 2020},
month = {Fri Jan 17 00:00:00 EST 2020}
}

Works referenced in this record:

3D hierarchical architectures based on self-rolled-up silicon nitride membranes
journal, October 2013


Self-organized InAs/InGaAsP quantum dot tube lasers
journal, July 2012

  • Bianucci, Pablo; Mukherjee, Shouvik; Dastjerdi, M. Hadi Tavakoli
  • Applied Physics Letters, Vol. 101, Issue 3
  • DOI: 10.1063/1.4737425

Three-Dimensional Nano-objects Evolving from a Two-Dimensional Layer Technology
journal, May 2001


On-Chip Inductors with Self-Rolled-Up SiN x Nanomembrane Tubes: A Novel Design Platform for Extreme Miniaturization
journal, February 2012

  • Huang, Wen; Yu, Xin; Froeter, Paul
  • Nano Letters, Vol. 12, Issue 12
  • DOI: 10.1021/nl303395d

From rolled-up Si microtubes to SiOx/Si optical ring resonators
journal, May 2007

  • Songmuang, R.; Rastelli, A.; Mendach, S.
  • Microelectronic Engineering, Vol. 84, Issue 5-8, p. 1427-1430
  • DOI: 10.1016/j.mee.2007.01.089

Elimination of Filter Inductor in Switching Cell AC–AC Converters Using Magnetic Integration
journal, September 2016

  • Khan, Ashraf Ali; Cha, Honnyong; Ahmed, Hafiz Furqan
  • IEEE Transactions on Power Electronics, Vol. 31, Issue 9
  • DOI: 10.1109/TPEL.2015.2501313

Electromagnetic ferrofluid-based energy harvester
journal, June 2012


Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays
journal, February 2000

  • Prinz, V. Ya; Seleznev, V. A.; Gutakovsky, A. K.
  • Physica E: Low-dimensional Systems and Nanostructures, Vol. 6, Issue 1-4, p. 828-831
  • DOI: 10.1016/S1386-9477(99)00249-0

Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils
journal, February 2001

  • Golod, S. V.; Prinz, V. Ya; Mashanov, V. I.
  • Semiconductor Science and Technology, Vol. 16, Issue 3
  • DOI: 10.1088/0268-1242/16/3/311

Prototyping a Ferrofluid-Cooled Transformer
journal, May 2013

  • Pislaru-Danescu, Lucian; Morega, Alexandru M.; Morega, Mihaela
  • IEEE Transactions on Industry Applications, Vol. 49, Issue 3
  • DOI: 10.1109/TIA.2013.2252872

Ni-Zn Ferrite Screen Printed Power Inductors for Compact DC-DC Power Converter Applications
journal, June 2009


A Class of Ceramic-Based Chip Inductors for Hybrid Integration in Power Supplies
journal, May 2008

  • Lim, M. H.; van Wyk, J. D.; Lee, F. C.
  • IEEE Transactions on Power Electronics, Vol. 23, Issue 3
  • DOI: 10.1109/TPEL.2008.921180

Toward Intelligent Synthetic Neural Circuits: Directing and Accelerating Neuron Cell Growth by Self-Rolled-Up Silicon Nitride Microtube Array
journal, November 2014

  • Froeter, Paul; Huang, Yu; Cangellaris, Olivia V.
  • ACS Nano, Vol. 8, Issue 11
  • DOI: 10.1021/nn504876y

High-Field Superconductivity at an Electronic Topological Transition in URhGe
text, January 2011


A Micromachined Wiring Board With Integrated Microinductor for Chip-Scale Power Conversion
journal, November 2014

  • Meyer, Christopher D.; Bedair, Sarah S.; Morgan, Brian C.
  • IEEE Transactions on Power Electronics, Vol. 29, Issue 11
  • DOI: 10.1109/TPEL.2013.2296507

Micro-inductors integrated on silicon for power supply on chip
journal, September 2007

  • Wang, Ningning; O’Donnell, Terence; Roy, Saibal
  • Journal of Magnetism and Magnetic Materials, Vol. 316, Issue 2
  • DOI: 10.1016/j.jmmm.2007.02.098

Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
journal, January 2006

  • Arora, William J.; Nichol, Anthony J.; Smith, Henry I.
  • Applied Physics Letters, Vol. 88, Issue 5
  • DOI: 10.1063/1.2168516

High Field Magnets With HTS Conductors
journal, June 2010

  • Weijers, H. W.; Trociewitz, U. P.; Markiewicz, W. D.
  • IEEE Transactions on Applied Superconductivity, Vol. 20, Issue 3
  • DOI: 10.1109/TASC.2010.2043080

Ferrofluids — Properties and applications
journal, July 1987


CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications
conference, June 2017

  • Huang, Wen; Zhou, Jingchao; Froeter, Paul
  • 2017 IEEE/MTT-S International Microwave Symposium - IMS 2017, 2017 IEEE MTT-S International Microwave Symposium (IMS)
  • DOI: 10.1109/MWSYM.2017.8058953

A fully MEMS-compatible process for 3D high aspect ratio micro coils obtained with an automatic wire bonder
journal, December 2009


Magnetoacoustic imaging of human liver tumor with magnetic induction
journal, January 2011

  • Hu, Gang; Cressman, Erik; He, Bin
  • Applied Physics Letters, Vol. 98, Issue 2
  • DOI: 10.1063/1.3543630

Size- and Composition-Dependent Radio Frequency Magnetic Permeability of Iron Oxide Nanocrystals
journal, November 2014

  • Yun, Hongseok; Liu, Xiyu; Paik, Taejong
  • ACS Nano, Vol. 8, Issue 12
  • DOI: 10.1021/nn504711g

Optical properties of rolled-up tubular microcavities from shaped nanomembranes
journal, April 2009

  • Kiravittaya, S.; Bolaños Quiñones, V. A.; Benyoucef, M.
  • Applied Physics Letters, Vol. 94, Issue 14, Article No. 141901
  • DOI: 10.1063/1.3111813

Toroidal hollow-core microcavities produced by self-rolling of strained polymer bilayer films
journal, February 2008


Three-Dimensional Solenoids Realized via High-Density Deep Coil Stacking for MEMS Application
journal, March 2012


Ferrofluids: properties and applications
journal, January 2005


Thin-Film-Integrated Power Inductor on Si and Its Performance in an 8-MHz Buck Converter
journal, November 2008


Three-dimensional radio-frequency transformers based on a self-rolled-up membrane platform
journal, May 2018


Magnetic Field-Induced Superconductivity in the Ferromagnet URhGe.
journal, November 2005


A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC–DC Converters
journal, May 2017

  • Li, Jiping; Tseng, Victor Farm-Guoo; Xiao, Zhiming
  • IEEE Transactions on Power Electronics, Vol. 32, Issue 5
  • DOI: 10.1109/TPEL.2016.2588501

Strain induced semiconductor nanotubes from formation process to device applications
journal, September 2008


High-field superconductivity at an electronic topological transition in URhGe
journal, August 2011

  • Yelland, E. A.; Barraclough, J. M.; Wang, W.
  • Nature Physics, Vol. 7, Issue 11
  • DOI: 10.1038/nphys2073

High winding density micro coils for magnetic actuators
journal, July 1998


A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC power converters
journal, March 1996

  • Ahn, C. H.; Allen, M. G.
  • IEEE Transactions on Power Electronics, Vol. 11, Issue 2
  • DOI: 10.1109/63.486171

Magnetic Field-Induced Superconductivity in the Ferromagnet URhGe
journal, August 2005


Rolled-Up Optical Microcavities with Subwavelength Wall Thicknesses for Enhanced Liquid Sensing Applications
journal, May 2010

  • Huang, Gaoshan; Bolaños Quiñones, Vladimir A.; Ding, Fei
  • ACS Nano, Vol. 4, Issue 6
  • DOI: 10.1021/nn100456r

Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
journal, January 2011

  • Li, Xiuling
  • Advances in Optics and Photonics, Vol. 3, Issue 4, p. 366-387
  • DOI: 10.1364/AOP.3.000366

Ultra-Small, High-Frequency and Substrate-Immune Microtube Inductors Transformed from 2D to 3D
journal, April 2015

  • Yu, Xin; Huang, Wen; Li, Moyang
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep09661

Rolled-Up Optical Microcavities with Subwavelength Wall Thicknesses for Enhanced Liquid Sensing Applications
journal, May 2010

  • Huang, Gaoshan; Bolaños Quiñones, Vladimir A.; Ding, Fei
  • ACS Nano, Vol. 4, Issue 6
  • DOI: 10.1021/nn100456r

Toward Intelligent Synthetic Neural Circuits: Directing and Accelerating Neuron Cell Growth by Self-Rolled-Up Silicon Nitride Microtube Array
journal, November 2014

  • Froeter, Paul; Huang, Yu; Cangellaris, Olivia V.
  • ACS Nano, Vol. 8, Issue 11
  • DOI: 10.1021/nn504876y

Ultra-Small, High-Frequency and Substrate-Immune Microtube Inductors Transformed from 2D to 3D
journal, April 2015

  • Yu, Xin; Huang, Wen; Li, Moyang
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep09661

Magnetoacoustic imaging of human liver tumor with magnetic induction
journal, January 2011

  • Hu, Gang; Cressman, Erik; He, Bin
  • Applied Physics Letters, Vol. 98, Issue 2
  • DOI: 10.1063/1.3543630

Self-organized InAs/InGaAsP quantum dot tube lasers
journal, July 2012

  • Bianucci, Pablo; Mukherjee, Shouvik; Dastjerdi, M. Hadi Tavakoli
  • Applied Physics Letters, Vol. 101, Issue 3
  • DOI: 10.1063/1.4737425

3D hierarchical architectures based on self-rolled-up silicon nitride membranes
journal, October 2013


Ferrofluid-Impregnated Paper Actuators
journal, February 2011

  • Ding, Zhenwen; Wei, Pinghung; Chitnis, Girish
  • Journal of Microelectromechanical Systems, Vol. 20, Issue 1
  • DOI: 10.1109/jmems.2010.2100026

Low-Resistance Integrated Toroidal Inductor for Power Management
journal, October 2006