Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler
Abstract
We report an efficient method to introduce enhanced axial confinement in the self-rolled-up SiNx vertical microtube coupler by depositing a thin layer of high refractive index material strip within the coupling section and effectively forming a vertical microring. Three times wider mode spacing is observed in such a vertical microring coupler monolithically integrated with a silicon nitride ridge waveguide as compared to the one without such axial confinement. More importantly, single mode operation within the telecomm C-band and S-band is achieved. The self-rolled-up microtube has been demonstrated to be a versatile device platform, which has found application in a number of areas including nanophotonics,1–7 microelectronics,8 chemical and biological sensing,9–11 and intelligent synthetic neural circuits.12 Because the microtube is a three dimensional (3D) structure readily fabricated using two dimensional processing technology, it may serve naturally as a component in 3D-integrated devices. We had previously demonstrated a vertical microtube coupler (VμTC) monolithically integrated with planar ridge waveguides in silicon photonic platform to achieve 3D photonic coupling and observed greatly enhanced coupling between the microtube and the underlying ridge waveguide.1,13 A similar result was reported independently by another research group shortly thereafter.2 One limitation of the VμTC used in previous experiments is thatmore »
- Authors:
-
- Univ. of Illinois, Urbana, IL (United States). Dept. of Electrical and Computer Engineering, Micro and Nanotechnology Lab.
- Publication Date:
- Research Org.:
- Univ. of Illinois, Urbana, IL (United States). Dept. of Electrical and Computer Engineering, Micro and Nanotechnology Lab.
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1468930
- Alternate Identifier(s):
- OSTI ID: 1324485
- Grant/Contract Number:
- FG02-07ER46471
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 109; Journal Issue: 11; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING; 36 MATERIALS SCIENCE
Citation Formats
Yu, Xin, Goddard, Lynford L., Li, Xiuling, and Chen, Xiaogang. Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler. United States: N. p., 2016.
Web. doi:10.1063/1.4962901.
Yu, Xin, Goddard, Lynford L., Li, Xiuling, & Chen, Xiaogang. Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler. United States. https://doi.org/10.1063/1.4962901
Yu, Xin, Goddard, Lynford L., Li, Xiuling, and Chen, Xiaogang. Wed .
"Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler". United States. https://doi.org/10.1063/1.4962901. https://www.osti.gov/servlets/purl/1468930.
@article{osti_1468930,
title = {Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler},
author = {Yu, Xin and Goddard, Lynford L. and Li, Xiuling and Chen, Xiaogang},
abstractNote = {We report an efficient method to introduce enhanced axial confinement in the self-rolled-up SiNx vertical microtube coupler by depositing a thin layer of high refractive index material strip within the coupling section and effectively forming a vertical microring. Three times wider mode spacing is observed in such a vertical microring coupler monolithically integrated with a silicon nitride ridge waveguide as compared to the one without such axial confinement. More importantly, single mode operation within the telecomm C-band and S-band is achieved. The self-rolled-up microtube has been demonstrated to be a versatile device platform, which has found application in a number of areas including nanophotonics,1–7 microelectronics,8 chemical and biological sensing,9–11 and intelligent synthetic neural circuits.12 Because the microtube is a three dimensional (3D) structure readily fabricated using two dimensional processing technology, it may serve naturally as a component in 3D-integrated devices. We had previously demonstrated a vertical microtube coupler (VμTC) monolithically integrated with planar ridge waveguides in silicon photonic platform to achieve 3D photonic coupling and observed greatly enhanced coupling between the microtube and the underlying ridge waveguide.1,13 A similar result was reported independently by another research group shortly thereafter.2 One limitation of the VμTC used in previous experiments is that it supports many modes within the telecommunication C-band because of poor axial confinement. For example, we found multiple resonant coupling peaks, which is not desirable for wavelength division multiplexing (WDM) switches. In order to increase the mode spacing of this 3D photonic coupler and to achieve single mode operation within the C-band, we propose efficient axial confinement in the microtube to suppress the higher order modes. Axial confinement in self-rolled-up microtubes had been studied both theoretically and experimentally by a couple of research groups.14–17 In all these previous cases, the axial confinement was introduced by a specially designed geometrical shape of a section of the microtube. After being rolled up, the microtube wall will have different thicknesses at different axial locations. The different wall thicknesses result in a slightly varying effective refractive index of the supported whispering gallery modes (WGMs) along the axial direction of the microtube. When a parabolic shape is used, the effective index of the WGM at the center of the parabola will be the highest and decrease adiabatically along both sides. However, the refractive index change due to different wall thicknesses is very small; hence, the axial confinement is rather weak. Here in this paper, we present our experimental endeavor to incorporate a different axial confinement scheme in the monolithically integrated vertical microtube (VμT) to form a vertical microring (VμR) resonator and demonstrate 3 times wider mode spacing than the microtube based vertical photonic coupler and the potential to achieve a higher Q-factor.},
doi = {10.1063/1.4962901},
journal = {Applied Physics Letters},
number = 11,
volume = 109,
place = {United States},
year = {Wed Sep 14 00:00:00 EDT 2016},
month = {Wed Sep 14 00:00:00 EDT 2016}
}
Web of Science
Works referenced in this record:
Vertically aligned rolled-up SiO 2 optical microcavities in add-drop configuration
journal, June 2013
- Böttner, Stefan; Li, Shilong; Jorgensen, Matthew R.
- Applied Physics Letters, Vol. 102, Issue 25
Optical modes in InGaAs/GaAs quantum dot microtube ring resonators at room temperature
journal, January 2009
- Li, F.; Vicknesh, S.; Mi, Z.
- Electronics Letters, Vol. 45, Issue 12
Dynamic axial mode tuning in a rolled-up optical microcavity
journal, December 2012
- Li, Shilong; Ma, Libo; Zhen, Honglou
- Applied Physics Letters, Vol. 101, Issue 23
An analytical model to investigate the resonant modes of the self-rolled-up microtube using conformal transformation
journal, January 2014
- Chen, Xiaogang
- Optics Express, Vol. 22, Issue 13
Lab-in-a-Tube: Detection of Individual Mouse Cells for Analysis in Flexible Split-Wall Microtube Resonator Sensors
journal, October 2011
- Smith, Elliot J.; Schulze, Sabine; Kiravittaya, Suwit
- Nano Letters, Vol. 11, Issue 10
3-D integrated heterogeneous intra-chip free-space optical interconnect
journal, January 2012
- Ciftcioglu, Berkehan; Berman, Rebecca; Wang, Shang
- Optics Express, Vol. 20, Issue 4
Pockels effect based fully integrated, strained silicon electro-optic modulator
journal, January 2011
- Chmielak, Bartos; Waldow, Michael; Matheisen, Christopher
- Optics Express, Vol. 19, Issue 18
An electrically injected rolled-up semiconductor tube laser
journal, January 2015
- Dastjerdi, M. H. T.; Djavid, M.; Mi, Z.
- Applied Physics Letters, Vol. 106, Issue 2
Localized optical resonances in low refractive index rolled-up microtube cavity for liquid-core optofluidic detection
journal, October 2012
- Bolaños Quiñones, Vladimir A.; Ma, Libo; Li, Shilong
- Applied Physics Letters, Vol. 101, Issue 15
Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration
journal, July 2015
- Yu, Xin; Arbabi, Ehsan; Goddard, Lynford L.
- Applied Physics Letters, Vol. 107, Issue 3
Optical Microcavities Formed by Semiconductor Microtubes Using a Bottlelike Geometry
journal, September 2008
- Strelow, Ch.; Rehberg, H.; Schultz, C. M.
- Physical Review Letters, Vol. 101, Issue 12
(Invited) High Performance Quantum Dot Microtube Lasers and Nanowire LEDs on Si
conference, January 2010
- Mi, Zetian; Chang, Yi-Lu; Li, Feng
- 217th ECS Meeting, ECS Transactions
Light confinement and mode splitting in rolled-up semiconductor microtube bottle resonators
journal, April 2012
- Strelow, Ch.; Schultz, C. M.; Rehberg, H.
- Physical Review B, Vol. 85, Issue 15
Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates
journal, January 2015
- Madani, Abbas; Kleinert, Moritz; Stolarek, David
- Optics Letters, Vol. 40, Issue 16
Ultra-Small, High-Frequency and Substrate-Immune Microtube Inductors Transformed from 2D to 3D
journal, April 2015
- Yu, Xin; Huang, Wen; Li, Moyang
- Scientific Reports, Vol. 5, Issue 1
Rolled-Up Optical Microcavities with Subwavelength Wall Thicknesses for Enhanced Liquid Sensing Applications
journal, May 2010
- Huang, Gaoshan; Bolaños Quiñones, Vladimir A.; Ding, Fei
- ACS Nano, Vol. 4, Issue 6
Toward Intelligent Synthetic Neural Circuits: Directing and Accelerating Neuron Cell Growth by Self-Rolled-Up Silicon Nitride Microtube Array
journal, November 2014
- Froeter, Paul; Huang, Yu; Cangellaris, Olivia V.
- ACS Nano, Vol. 8, Issue 11
Works referencing / citing this record:
Rolled‐up Nanotechnology: Materials Issue and Geometry Capability
journal, December 2018
- Xu, Changhao; Wu, Xiang; Huang, Gaoshan
- Advanced Materials Technologies
Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides
journal, January 2018
- Yu, Xin; Goddard, Lynford L.; Zhu, Jinlong
- Applied Physics Letters, Vol. 112, Issue 2