Selective Transfer of Rotationally Commensurate MoS2 from an Epitaxially Grown van der Waals Heterostructure
Abstract
We report that large-scale synthesis of high-quality two-dimensional (2D) semiconductors is critical for their incorporation in emerging electronic and optoelectronic technologies. In particular, chemical vapor deposition (CVD) of transition-metal dichalcogenides (TMDs) via van der Waals epitaxy on epitaxial graphene (EG) leads to rotationally commensurate TMDs in contrast to randomly aligned TMDs grown on amorphous oxide substrates. However, the interlayer coupling between TMDs and EG hinders the investigation and utilization of the intrinsic electronic properties of the resulting TMDs, thus requiring their isolation from the EG growth substrate. To address this issue, we report here a technique for selectively transferring monolayer molybdenum disulfide (MoS2) from CVD-grown MoS2-EG van der Waals heterojunctions using copper (Cu) adhesion layers. The choice of Cu as the adhesion layer is motivated by density functional theory calculations that predict the preferential binding of monolayer MoS2 to Cu in contrast to graphene. Atomic force microscopy and optical spectroscopy confirm the large-scale transfer of rotationally commensurate MoS2 onto SiO2/Si substrates without cracks, wrinkles, or residues. Furthermore, the transferred MoS2 shows high performance in field-effect transistors with mobilities of up to 30 cm2/V s and on/off ratios of up to 106 at room temperature. Lastly, this transfer technique can likelymore »
- Authors:
-
- Northwestern Univ., Evanston, IL (United States)
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC) (United States). Center for Light Energy Activated Redox Processes (LEAP); Northwestern Univ., Evanston, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1566489
- Grant/Contract Number:
- SC0001059
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Chemistry of Materials
- Additional Journal Information:
- Journal Volume: 30; Journal Issue: 23; Journal ID: ISSN 0897-4756
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; catalysis (homogeneous); catalysis (heterogeneous); solar (photovoltaic); solar (fuels); optics; phonons; photosynthesis (natural and artificial); bio-inspired; hydrogen and fuel cells; charge transport; magnetism and spin physics; materials and chemistry by design; mesostructured materials; synthesis (novel materials); synthesis (self-assembly); synthesis (scalable processing)
Citation Formats
Kang, Junmo, Balla, Itamar, Liu, Xiaolong, Bergeron, Hadallia, Kim, Soo, Wolverton, Christopher, and Hersam, Mark C. Selective Transfer of Rotationally Commensurate MoS2 from an Epitaxially Grown van der Waals Heterostructure. United States: N. p., 2018.
Web. doi:10.1021/acs.chemmater.8b03128.
Kang, Junmo, Balla, Itamar, Liu, Xiaolong, Bergeron, Hadallia, Kim, Soo, Wolverton, Christopher, & Hersam, Mark C. Selective Transfer of Rotationally Commensurate MoS2 from an Epitaxially Grown van der Waals Heterostructure. United States. https://doi.org/10.1021/acs.chemmater.8b03128
Kang, Junmo, Balla, Itamar, Liu, Xiaolong, Bergeron, Hadallia, Kim, Soo, Wolverton, Christopher, and Hersam, Mark C. Fri .
"Selective Transfer of Rotationally Commensurate MoS2 from an Epitaxially Grown van der Waals Heterostructure". United States. https://doi.org/10.1021/acs.chemmater.8b03128. https://www.osti.gov/servlets/purl/1566489.
@article{osti_1566489,
title = {Selective Transfer of Rotationally Commensurate MoS2 from an Epitaxially Grown van der Waals Heterostructure},
author = {Kang, Junmo and Balla, Itamar and Liu, Xiaolong and Bergeron, Hadallia and Kim, Soo and Wolverton, Christopher and Hersam, Mark C.},
abstractNote = {We report that large-scale synthesis of high-quality two-dimensional (2D) semiconductors is critical for their incorporation in emerging electronic and optoelectronic technologies. In particular, chemical vapor deposition (CVD) of transition-metal dichalcogenides (TMDs) via van der Waals epitaxy on epitaxial graphene (EG) leads to rotationally commensurate TMDs in contrast to randomly aligned TMDs grown on amorphous oxide substrates. However, the interlayer coupling between TMDs and EG hinders the investigation and utilization of the intrinsic electronic properties of the resulting TMDs, thus requiring their isolation from the EG growth substrate. To address this issue, we report here a technique for selectively transferring monolayer molybdenum disulfide (MoS2) from CVD-grown MoS2-EG van der Waals heterojunctions using copper (Cu) adhesion layers. The choice of Cu as the adhesion layer is motivated by density functional theory calculations that predict the preferential binding of monolayer MoS2 to Cu in contrast to graphene. Atomic force microscopy and optical spectroscopy confirm the large-scale transfer of rotationally commensurate MoS2 onto SiO2/Si substrates without cracks, wrinkles, or residues. Furthermore, the transferred MoS2 shows high performance in field-effect transistors with mobilities of up to 30 cm2/V s and on/off ratios of up to 106 at room temperature. Lastly, this transfer technique can likely be generalized to other TMDs and related 2D materials grown on EG, thus offering a broad range of benefits in nanoelectronic, optoelectronic, and photonic applications.},
doi = {10.1021/acs.chemmater.8b03128},
journal = {Chemistry of Materials},
number = 23,
volume = 30,
place = {United States},
year = {Fri Nov 16 00:00:00 EST 2018},
month = {Fri Nov 16 00:00:00 EST 2018}
}
Web of Science
Works referenced in this record:
Van der Waals heterostructures
journal, July 2013
- Geim, A. K.; Grigorieva, I. V.
- Nature, Vol. 499, Issue 7459, p. 419-425
Two-dimensional flexible nanoelectronics
journal, December 2014
- Akinwande, Deji; Petrone, Nicholas; Hone, James
- Nature Communications, Vol. 5, Issue 1
2D transition metal dichalcogenides
journal, June 2017
- Manzeli, Sajedeh; Ovchinnikov, Dmitry; Pasquier, Diego
- Nature Reviews Materials, Vol. 2, Issue 8
Stacking of Two-Dimensional Materials in Lateral and Vertical Directions
journal, August 2014
- Lim, Hyunseob; Yoon, Seong In; Kim, Gwangwoo
- Chemistry of Materials, Vol. 26, Issue 17
Probing Out-of-Plane Charge Transport in Black Phosphorus with Graphene-Contacted Vertical Field-Effect Transistors
journal, March 2016
- Kang, Junmo; Jariwala, Deep; Ryder, Christopher R.
- Nano Letters, Vol. 16, Issue 4
Single-layer MoS2 transistors
journal, January 2011
- Radisavljevic, B.; Radenovic, A.; Brivio, J.
- Nature Nanotechnology, Vol. 6, Issue 3, p. 147-150
Ultrasensitive photodetectors based on monolayer MoS2
journal, June 2013
- Lopez-Sanchez, Oriol; Lembke, Dominik; Kayci, Metin
- Nature Nanotechnology, Vol. 8, Issue 7
Enhanced Raman Scattering of Rhodamine 6G Films on Two-Dimensional Transition Metal Dichalcogenides Correlated to Photoinduced Charge Transfer
journal, December 2015
- Lee, Youngbin; Kim, Hyunmin; Lee, Jinhwan
- Chemistry of Materials, Vol. 28, Issue 1
Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition
journal, March 2012
- Lee, Yi-Hsien; Zhang, Xin-Quan; Zhang, Wenjing
- Advanced Materials, Vol. 24, Issue 17, p. 2320-2325
Large-Area Vapor-Phase Growth and Characterization of MoS2 Atomic Layers on a SiO2 Substrate
journal, February 2012
- Zhan, Yongjie; Liu, Zheng; Najmaei, Sina
- Small, Vol. 8, Issue 7, p. 966-971
Shape Evolution of Monolayer MoS 2 Crystals Grown by Chemical Vapor Deposition
journal, November 2014
- Wang, Shanshan; Rong, Youmin; Fan, Ye
- Chemistry of Materials, Vol. 26, Issue 22
Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS 2 by Pulsed Metal–Organic Chemical Vapor Deposition
journal, July 2017
- Kalanyan, Berc; Kimes, William A.; Beams, Ryan
- Chemistry of Materials, Vol. 29, Issue 15
Chemical vapor deposition of monolayer MoS 2 directly on ultrathin Al 2 O 3 for low-power electronics
journal, January 2017
- Bergeron, Hadallia; Sangwan, Vinod K.; McMorrow, Julian J.
- Applied Physics Letters, Vol. 110, Issue 5
Grains and grain boundaries in highly crystalline monolayer molybdenum disulphide
journal, May 2013
- van der Zande, Arend M.; Huang, Pinshane Y.; Chenet, Daniel A.
- Nature Materials, Vol. 12, Issue 6, p. 554-561
Electrical Transport Properties of Polycrystalline Monolayer Molybdenum Disulfide
journal, July 2014
- Najmaei, Sina; Amani, Matin; Chin, Matthew L.
- ACS Nano, Vol. 8, Issue 8
Surface Recombination Limited Lifetimes of Photoexcited Carriers in Few-Layer Transition Metal Dichalcogenide MoS 2
journal, November 2015
- Wang, Haining; Zhang, Changjian; Rana, Farhan
- Nano Letters, Vol. 15, Issue 12
Visualizing nanoscale excitonic relaxation properties of disordered edges and grain boundaries in monolayer molybdenum disulfide
journal, August 2015
- Bao, Wei; Borys, Nicholas J.; Ko, Changhyun
- Nature Communications, Vol. 6, Issue 1
Large-Area Epitaxial Monolayer MoS 2
journal, February 2015
- Dumcenco, Dumitru; Ovchinnikov, Dmitry; Marinov, Kolyo
- ACS Nano, Vol. 9, Issue 4
Rotationally Commensurate Growth of MoS 2 on Epitaxial Graphene
journal, November 2015
- Liu, Xiaolong; Balla, Itamar; Bergeron, Hadallia
- ACS Nano, Vol. 10, Issue 1
Point Defects and Grain Boundaries in Rotationally Commensurate MoS 2 on Epitaxial Graphene
journal, March 2016
- Liu, Xiaolong; Balla, Itamar; Bergeron, Hadallia
- The Journal of Physical Chemistry C, Vol. 120, Issue 37
Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition
journal, January 2009
- Reina, Alfonso; Jia, Xiaoting; Ho, John
- Nano Letters, Vol. 9, Issue 1
Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes
journal, December 2009
- Li, Xuesong; Zhu, Yanwu; Cai, Weiwei
- Nano Letters, Vol. 9, Issue 12
Graphene transfer: key for applications
journal, January 2012
- Kang, Junmo; Shin, Dolly; Bae, Sukang
- Nanoscale, Vol. 4, Issue 18
The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO 2
journal, September 2011
- Pirkle, A.; Chan, J.; Venugopal, A.
- Applied Physics Letters, Vol. 99, Issue 12
Principle of direct van der Waals epitaxy of single-crystalline films on epitaxial graphene
journal, September 2014
- Kim, Jeehwan; Bayram, Can; Park, Hongsik
- Nature Communications, Vol. 5, Issue 1
Remote epitaxy through graphene enables two-dimensional material-based layer transfer
journal, April 2017
- Kim, Yunjo; Cruz, Samuel S.; Lee, Kyusang
- Nature, Vol. 544, Issue 7650
Layer-Resolved Graphene Transfer via Engineered Strain Layers
journal, October 2013
- Kim, J.; Park, H.; Hannon, J. B.
- Science, Vol. 342, Issue 6160, p. 833-836
Interface structure and mechanics between graphene and metal substrates: a first-principles study
journal, November 2010
- Xu, Zhiping; Buehler, Markus J.
- Journal of Physics: Condensed Matter, Vol. 22, Issue 48
Interfacial Properties of Monolayer and Bilayer MoS2 Contacts with Metals: Beyond the Energy Band Calculations
journal, March 2016
- Zhong, Hongxia; Quhe, Ruge; Wang, Yangyang
- Scientific Reports, Vol. 6, Issue 1
Chemical accuracy for the van der Waals density functional
journal, December 2009
- Klimeš, Jiří; Bowler, David R.; Michaelides, Angelos
- Journal of Physics: Condensed Matter, Vol. 22, Issue 2
van der Waals Interactions in Layered Lithium Cobalt Oxides
journal, August 2015
- Aykol, Muratahan; Kim, Soo; Wolverton, C.
- The Journal of Physical Chemistry C, Vol. 119, Issue 33
Layered-Layered-Spinel Cathode Materials Prepared by a High-Energy Ball-Milling Process for Lithium-ion Batteries
journal, December 2015
- Kim, Soo; Noh, Jae-Kyo; Aykol, Muratahan
- ACS Applied Materials & Interfaces, Vol. 8, Issue 1
Organic Dye Graphene Hybrid Structures with Spectral Color Selectivity
journal, July 2016
- Gim, Yu Seong; Lee, Youngbin; Kim, Soo
- Advanced Functional Materials, Vol. 26, Issue 36
Comprehensive Enhancement of Nanostructured Lithium-Ion Battery Cathode Materials via Conformal Graphene Dispersion
journal, March 2017
- Chen, Kan-Sheng; Xu, Rui; Luu, Norman S.
- Nano Letters, Vol. 17, Issue 4
Quasi-Periodic Nanoripples in Graphene Grown by Chemical Vapor Deposition and Its Impact on Charge Transport
journal, January 2012
- Ni, Guang-Xin; Zheng, Yi; Bae, Sukang
- ACS Nano, Vol. 6, Issue 2
Uniaxial Strain on Graphene: Raman Spectroscopy Study and Band-Gap Opening
journal, October 2008
- Ni, Zhen Hua; Yu, Ting; Lu, Yun Hao
- ACS Nano, Vol. 2, Issue 11
Universal Transfer and Stacking of Chemical Vapor Deposition Grown Two-Dimensional Atomic Layers with Water-Soluble Polymer Mediator
journal, May 2016
- Lu, Zhixing; Sun, Lifei; Xu, Guanchen
- ACS Nano, Vol. 10, Issue 5
The effect of the substrate on the Raman and photoluminescence emission of single-layer MoS2
journal, April 2014
- Buscema, Michele; Steele, Gary A.; van der Zant, Herre S. J.
- Nano Research, Vol. 7, Issue 4
Anomalous Lattice Vibrations of Single- and Few-Layer MoS 2
journal, March 2010
- Lee, Changgu; Yan, Hugen; Brus, Louis E.
- ACS Nano, Vol. 4, Issue 5
From Bulk to Monolayer MoS2: Evolution of Raman Scattering
journal, January 2012
- Li, Hong; Zhang, Qing; Yap, Chin Chong Ray
- Advanced Functional Materials, Vol. 22, Issue 7
Exceptional Tunability of Band Energy in a Compressively Strained Trilayer MoS 2 Sheet
journal, July 2013
- Hui, Yeung Yu; Liu, Xiaofei; Jie, Wenjing
- ACS Nano, Vol. 7, Issue 8
Local Strain Engineering in Atomically Thin MoS 2
journal, October 2013
- Castellanos-Gomez, Andres; Roldán, Rafael; Cappelluti, Emmanuele
- Nano Letters, Vol. 13, Issue 11
Controlled van der Waals Epitaxy of Monolayer MoS 2 Triangular Domains on Graphene
journal, February 2015
- Ago, Hiroki; Endo, Hiroko; Solís-Fernández, Pablo
- ACS Applied Materials & Interfaces, Vol. 7, Issue 9
Elastic Properties of Chemical-Vapor-Deposited Monolayer MoS 2 , WS 2 , and Their Bilayer Heterostructures
journal, August 2014
- Liu, Kai; Yan, Qimin; Chen, Michelle
- Nano Letters, Vol. 14, Issue 9
Large area molybdenum disulphide- epitaxial graphene vertical Van der Waals heterostructures
journal, June 2016
- Pierucci, Debora; Henck, Hugo; Naylor, Carl H.
- Scientific Reports, Vol. 6, Issue 1
Band-like transport in high mobility unencapsulated single-layer MoS 2 transistors
journal, April 2013
- Jariwala, Deep; Sangwan, Vinod K.; Late, Dattatray J.
- Applied Physics Letters, Vol. 102, Issue 17
High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity
journal, April 2015
- Kang, Kibum; Xie, Saien; Huang, Lujie
- Nature, Vol. 520, Issue 7549
Statistical Study of Deep Submicron Dual-Gated Field-Effect Transistors on Monolayer Chemical Vapor Deposition Molybdenum Disulfide Films
journal, May 2013
- Liu, Han; Si, Mengwei; Najmaei, Sina
- Nano Letters, Vol. 13, Issue 6
Works referencing / citing this record:
A unique hierarchical composite with auricular-like MoS2 nanosheets erected on graphene for enhanced lithium storage
journal, August 2019
- Liu, Xiaowen; Liu, Gang; Yu, Changqiang
- Journal of Solid State Electrochemistry, Vol. 23, Issue 10
2D transition metal dichalcogenide nanomaterials: advances, opportunities, and challenges in multi-functional polymer nanocomposites
journal, January 2020
- Ahmadi, Mojtaba; Zabihi, Omid; Jeon, Seokwoo
- Journal of Materials Chemistry A, Vol. 8, Issue 3