Review of the 1st EUV Light Sources Code Comparison Workshop
Abstract
We review the results of the 1st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop. The goal of this workshop was to provide a platform for specialists in EUV light source plasma modeling to benchmark and validate their numerical codes using well-defined case studies. Detailed consideration of a plethora of atomic collisional and radiative processes is required for modeling EUV light source plasmas. Eight institutions spanning four countries contributed data to the workshop. Two topics were addressed, namely (i) the atomic kinetics and radiative properties of tin plasmas under EUV-generating conditions and (ii) laser absorption in a fully ionized, one-dimensional hydrogen plasma. In this paper, we summarize the key findings of the workshop and outline plans for future iterations of the code comparison activity.
- Authors:
-
[1];
- Advanced Research Center for Nanolithography, Amsterdam (Netherlands)
- Advanced Research Center for Nanolithography, Amsterdam (Netherlands); Vrije Universiteit, Amsterdam (Netherlands)
- EUV Litho, Inc., Austin, TX (United States)
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 2280475
- Report Number(s):
- LLNL-JRNL-858959
Journal ID: ISSN 2218-2004; 1089039
- Grant/Contract Number:
- AC52-07NA27344
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Atoms
- Additional Journal Information:
- Journal Volume: 11; Journal Issue: 10; Journal ID: ISSN 2218-2004
- Publisher:
- MDPI
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; EUV source plasma; code comparison; atomic kinetics; laser absorption
Citation Formats
Sheil, John, Versolato, Oscar, Bakshi, Vivek, and Scott, Howard. Review of the 1st EUV Light Sources Code Comparison Workshop. United States: N. p., 2023.
Web. doi:10.3390/atoms11100130.
Sheil, John, Versolato, Oscar, Bakshi, Vivek, & Scott, Howard. Review of the 1st EUV Light Sources Code Comparison Workshop. United States. https://doi.org/10.3390/atoms11100130
Sheil, John, Versolato, Oscar, Bakshi, Vivek, and Scott, Howard. Fri .
"Review of the 1st EUV Light Sources Code Comparison Workshop". United States. https://doi.org/10.3390/atoms11100130. https://www.osti.gov/servlets/purl/2280475.
@article{osti_2280475,
title = {Review of the 1st EUV Light Sources Code Comparison Workshop},
author = {Sheil, John and Versolato, Oscar and Bakshi, Vivek and Scott, Howard},
abstractNote = {We review the results of the 1st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop. The goal of this workshop was to provide a platform for specialists in EUV light source plasma modeling to benchmark and validate their numerical codes using well-defined case studies. Detailed consideration of a plethora of atomic collisional and radiative processes is required for modeling EUV light source plasmas. Eight institutions spanning four countries contributed data to the workshop. Two topics were addressed, namely (i) the atomic kinetics and radiative properties of tin plasmas under EUV-generating conditions and (ii) laser absorption in a fully ionized, one-dimensional hydrogen plasma. In this paper, we summarize the key findings of the workshop and outline plans for future iterations of the code comparison activity.},
doi = {10.3390/atoms11100130},
journal = {Atoms},
number = 10,
volume = 11,
place = {United States},
year = {Fri Oct 13 00:00:00 EDT 2023},
month = {Fri Oct 13 00:00:00 EDT 2023}
}
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