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Title: Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources

Abstract

Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5{+-}0.135 nm. A simplified collisional-radiative model and radiative transfer solution for an isotropic medium were utilized to investigate the wavelength-integrated light outputs in tin (Sn) plasma. Detailed calculations using the Hebrew University-Lawrence Livermore atomic code were employed for determination of necessary atomic data of the Sn{sup 4+} to Sn{sup 13+} charge states. The result of model is compared with experimental spectra from a Sn-based discharge-produced plasma. The analysis reveals that considerably larger efficiency compared to the so-called efficiency of a black-body radiator is formed for the electron density {approx_equal}10{sup 18} cm{sup -3}. For higher electron density, the spectral efficiency of Sn plasma reduces due to the saturation of resonance transitions.

Authors:
; ; ; ; ;  [1];  [2];  [2]
  1. Department of Energy Sciences, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
20982667
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 3; Other Information: DOI: 10.1063/1.2434987; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; CHARGE STATES; ELECTRIC DISCHARGES; ELECTRON DENSITY; ELECTRON TEMPERATURE; EXTREME ULTRAVIOLET RADIATION; ION TEMPERATURE; LIGHT BULBS; PLASMA; PLASMA DENSITY; RADIANT HEAT TRANSFER; SPECTRA; TIN; TIN IONS

Citation Formats

Masnavi, Majid, Nakajima, Mitsuo, Hotta, Eiki, Horioka, Kazuhiko, Niimi, Gohta, Sasaki, Akira, Gotenba Division, Ushio, 1-90 Komakado, Gotenba, Shizuoka 412-0038, and Advanced Photon Research Center, Japan Atomic Energy Research Institute, Kyoto 619-0215. Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources. United States: N. p., 2007. Web. doi:10.1063/1.2434987.
Masnavi, Majid, Nakajima, Mitsuo, Hotta, Eiki, Horioka, Kazuhiko, Niimi, Gohta, Sasaki, Akira, Gotenba Division, Ushio, 1-90 Komakado, Gotenba, Shizuoka 412-0038, & Advanced Photon Research Center, Japan Atomic Energy Research Institute, Kyoto 619-0215. Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources. United States. doi:10.1063/1.2434987.
Masnavi, Majid, Nakajima, Mitsuo, Hotta, Eiki, Horioka, Kazuhiko, Niimi, Gohta, Sasaki, Akira, Gotenba Division, Ushio, 1-90 Komakado, Gotenba, Shizuoka 412-0038, and Advanced Photon Research Center, Japan Atomic Energy Research Institute, Kyoto 619-0215. Thu . "Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources". United States. doi:10.1063/1.2434987.
@article{osti_20982667,
title = {Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources},
author = {Masnavi, Majid and Nakajima, Mitsuo and Hotta, Eiki and Horioka, Kazuhiko and Niimi, Gohta and Sasaki, Akira and Gotenba Division, Ushio, 1-90 Komakado, Gotenba, Shizuoka 412-0038 and Advanced Photon Research Center, Japan Atomic Energy Research Institute, Kyoto 619-0215},
abstractNote = {Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5{+-}0.135 nm. A simplified collisional-radiative model and radiative transfer solution for an isotropic medium were utilized to investigate the wavelength-integrated light outputs in tin (Sn) plasma. Detailed calculations using the Hebrew University-Lawrence Livermore atomic code were employed for determination of necessary atomic data of the Sn{sup 4+} to Sn{sup 13+} charge states. The result of model is compared with experimental spectra from a Sn-based discharge-produced plasma. The analysis reveals that considerably larger efficiency compared to the so-called efficiency of a black-body radiator is formed for the electron density {approx_equal}10{sup 18} cm{sup -3}. For higher electron density, the spectral efficiency of Sn plasma reduces due to the saturation of resonance transitions.},
doi = {10.1063/1.2434987},
journal = {Journal of Applied Physics},
number = 3,
volume = 101,
place = {United States},
year = {Thu Feb 01 00:00:00 EST 2007},
month = {Thu Feb 01 00:00:00 EST 2007}
}