Tuning of the electronic and vibrational properties of epitaxial MoS 2 through He-ion beam modification
Abstract
Abstract Atomically thin transition metal dichalcogenides (TMDs), like MoS 2 with high carrier mobilities and tunable electron dispersions, are unique active material candidates for next generation opto-electronic devices. Previous studies on ion irradiation show great potential applications when applied to two-dimensional (2D) materials, yet have been limited to micron size exfoliated flakes or smaller. To demonstrate the scalability of this method for industrial applications, we report the application of relatively low power (50 keV) 4 He + ion irradiation towards tuning the optoelectronic properties of an epitaxially grown continuous film of MoS 2 at the wafer scale, and demonstrate that precise manipulation of atomistic defects can be achieved in TMD films using ion implanters. The effect of 4 He + ion fluence on the PL and Raman signatures of the irradiated film provides new insights into the type and concentration of defects formed in the MoS 2 lattice, which are quantified through ion beam analysis. PL and Raman spectroscopy indicate that point defects are generated without causing disruption to the underlying lattice structure of the 2D films and hence, this technique can prove to be an effective way to achieve defect-mediated control over the opto-electronic properties of MoS 2 andmore »
- Authors:
- Publication Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE Laboratory Directed Research and Development (LDRD) Program; National Science Foundation (NSF)
- OSTI Identifier:
- 1902184
- Alternate Identifier(s):
- OSTI ID: 1898699; OSTI ID: 1900500
- Report Number(s):
- LA-UR-22-27109
Journal ID: ISSN 0957-4484
- Grant/Contract Number:
- 89233218CNA000001; 20210036DR; 20210782ER; DMR-1539916; DMR-2039351
- Resource Type:
- Published Article
- Journal Name:
- Nanotechnology
- Additional Journal Information:
- Journal Name: Nanotechnology Journal Volume: 34 Journal Issue: 8; Journal ID: ISSN 0957-4484
- Publisher:
- IOP Publishing
- Country of Publication:
- United Kingdom
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; Material Science
Citation Formats
Parida, Shayani, Wang, Yongqiang, Zhao, Huan, Htoon, Han, Kucinski, Theresa Marie, Chubarov, Mikhail, Choudhury, Tanushree, Redwing, Joan Marie, Dongare, Avinash, and Pettes, Michael Thompson. Tuning of the electronic and vibrational properties of epitaxial MoS 2 through He-ion beam modification. United Kingdom: N. p., 2022.
Web. doi:10.1088/1361-6528/aca3af.
Parida, Shayani, Wang, Yongqiang, Zhao, Huan, Htoon, Han, Kucinski, Theresa Marie, Chubarov, Mikhail, Choudhury, Tanushree, Redwing, Joan Marie, Dongare, Avinash, & Pettes, Michael Thompson. Tuning of the electronic and vibrational properties of epitaxial MoS 2 through He-ion beam modification. United Kingdom. https://doi.org/10.1088/1361-6528/aca3af
Parida, Shayani, Wang, Yongqiang, Zhao, Huan, Htoon, Han, Kucinski, Theresa Marie, Chubarov, Mikhail, Choudhury, Tanushree, Redwing, Joan Marie, Dongare, Avinash, and Pettes, Michael Thompson. Wed .
"Tuning of the electronic and vibrational properties of epitaxial MoS 2 through He-ion beam modification". United Kingdom. https://doi.org/10.1088/1361-6528/aca3af.
@article{osti_1902184,
title = {Tuning of the electronic and vibrational properties of epitaxial MoS 2 through He-ion beam modification},
author = {Parida, Shayani and Wang, Yongqiang and Zhao, Huan and Htoon, Han and Kucinski, Theresa Marie and Chubarov, Mikhail and Choudhury, Tanushree and Redwing, Joan Marie and Dongare, Avinash and Pettes, Michael Thompson},
abstractNote = {Abstract Atomically thin transition metal dichalcogenides (TMDs), like MoS 2 with high carrier mobilities and tunable electron dispersions, are unique active material candidates for next generation opto-electronic devices. Previous studies on ion irradiation show great potential applications when applied to two-dimensional (2D) materials, yet have been limited to micron size exfoliated flakes or smaller. To demonstrate the scalability of this method for industrial applications, we report the application of relatively low power (50 keV) 4 He + ion irradiation towards tuning the optoelectronic properties of an epitaxially grown continuous film of MoS 2 at the wafer scale, and demonstrate that precise manipulation of atomistic defects can be achieved in TMD films using ion implanters. The effect of 4 He + ion fluence on the PL and Raman signatures of the irradiated film provides new insights into the type and concentration of defects formed in the MoS 2 lattice, which are quantified through ion beam analysis. PL and Raman spectroscopy indicate that point defects are generated without causing disruption to the underlying lattice structure of the 2D films and hence, this technique can prove to be an effective way to achieve defect-mediated control over the opto-electronic properties of MoS 2 and other 2D materials.},
doi = {10.1088/1361-6528/aca3af},
journal = {Nanotechnology},
number = 8,
volume = 34,
place = {United Kingdom},
year = {Wed Dec 07 00:00:00 EST 2022},
month = {Wed Dec 07 00:00:00 EST 2022}
}
https://doi.org/10.1088/1361-6528/aca3af
Works referenced in this record:
Defect-Induced Photoluminescence Enhancement and Corresponding Transport Degradation in Individual Suspended Carbon Nanotubes
journal, May 2018
- Wang, Bo; Shen, Lang; Yang, Sisi
- Physical Review Applied, Vol. 9, Issue 5
Generalized Gradient Approximation Made Simple
journal, October 1996
- Perdew, John P.; Burke, Kieron; Ernzerhof, Matthias
- Physical Review Letters, Vol. 77, Issue 18, p. 3865-3868
Strong Photoluminescence Enhancement of MoS 2 through Defect Engineering and Oxygen Bonding
journal, May 2014
- Nan, Haiyan; Wang, Zilu; Wang, Wenhui
- ACS Nano, Vol. 8, Issue 6
Concepts and designs of ion implantation equipment for semiconductor processing
journal, November 2006
- Rose, Peter H.; Ryding, Geoffrey
- Review of Scientific Instruments, Vol. 77, Issue 11
Changes in the Photoluminescence of Monolayer and Bilayer Molybdenum Disulfide during Laser Irradiation
journal, April 2020
- Kim, Ho-Jong; Yun, Yong Ju; Yi, Sam Nyung
- ACS Omega, Vol. 5, Issue 14
Projector augmented-wave method
journal, December 1994
- Blöchl, P. E.
- Physical Review B, Vol. 50, Issue 24, p. 17953-17979
Temperature-Dependent Nonlinear Phonon Shifts in a Supported MoS 2 Monolayer
journal, June 2014
- Taube, Andrzej; Judek, Jarosław; Jastrzębski, Cezariusz
- ACS Applied Materials & Interfaces, Vol. 6, Issue 12
Emerging Opportunities for Two-Dimensional Materials in Lithium-Ion Batteries
journal, August 2017
- Chen, Kan-Sheng; Balla, Itamar; Luu, Norman S.
- ACS Energy Letters, Vol. 2, Issue 9
Controllable defects implantation in MoS2 grown by chemical vapor deposition for photoluminescence enhancement
journal, February 2018
- Wu, Ke; Li, Zhe; Tang, Jibo
- Nano Research, Vol. 11, Issue 8
Molecular dynamics simulations of ion beam irradiation on graphene/MoS2 heterostructure
journal, October 2021
- Wu, Xin; Zhu, Xiaobao
- Scientific Reports, Vol. 11, Issue 1
Effect of Intercalated Metals on the Electrocatalytic Activity of 1T-MoS 2 for the Hydrogen Evolution Reaction
journal, November 2017
- Attanayake, Nuwan H.; Thenuwara, Akila C.; Patra, Abhirup
- ACS Energy Letters, Vol. 3, Issue 1
Activating MoS
2
Nanoflakes via Sulfur Defect Engineering Wrapped on CNTs for Stable and Efficient Li‐O
2
Batteries
journal, November 2021
- Li, Deyuan; Zhao, Lanling; Xia, Qing
- Advanced Functional Materials, Vol. 32, Issue 8
Postgrowth Tuning of the Bandgap of Single-Layer Molybdenum Disulfide Films by Sulfur/Selenium Exchange
journal, April 2014
- Ma, Quan; Isarraraz, Miguel; Wang, Chen S.
- ACS Nano, Vol. 8, Issue 5
Introduction: 2D Materials Chemistry
journal, July 2018
- Zhang, Hua
- Chemical Reviews, Vol. 118, Issue 13
Locally defined quantum emission from epitaxial few-layer tungsten diselenide
journal, May 2019
- Wu, Wei; Dass, Chandriker K.; Hendrickson, Joshua R.
- Applied Physics Letters, Vol. 114, Issue 21
A- and B-exciton photoluminescence intensity ratio as a measure of sample quality for transition metal dichalcogenide monolayers
journal, November 2018
- McCreary, Kathleen M.; Hanbicki, Aubrey T.; Sivaram, Saujan V.
- APL Materials, Vol. 6, Issue 11
Brightening of carbon nanotube photoluminescence through the incorporation of sp3 defects
journal, July 2013
- Piao, Yanmei; Meany, Brendan; Powell, Lyndsey R.
- Nature Chemistry, Vol. 5, Issue 10
Proton beam flux dependent work function of mono-layer MoS2
journal, August 2018
- Kwon, Sangwoo; Choi, Soo Ho; Kim, You Joong
- Thin Solid Films, Vol. 660
Isotope Effect in Bilayer WSe 2
journal, February 2019
- Wu, Wei; Morales-Acosta, Mayra Daniela; Wang, Yongqiang
- Nano Letters, Vol. 19, Issue 3
Large-scale quantum-emitter arrays in atomically thin semiconductors
journal, May 2017
- Palacios-Berraquero, Carmen; Kara, Dhiren M.; Montblanch, Alejandro R. -P.
- Nature Communications, Vol. 8, Issue 1
Defect-Rich MoS 2 Ultrathin Nanosheets with Additional Active Edge Sites for Enhanced Electrocatalytic Hydrogen Evolution
journal, August 2013
- Xie, Junfeng; Zhang, Hao; Li, Shuang
- Advanced Materials, Vol. 25, Issue 40
Defect Engineering of MoS2 for Room-Temperature Terahertz Photodetection
journal, January 2020
- Xie, Ying; Liang, Fei; Chi, Shumeng
- ACS Applied Materials & Interfaces, Vol. 12, Issue 6
Atomically Thin A New Direct-Gap Semiconductor
journal, September 2010
- Mak, Kin Fai; Lee, Changgu; Hone, James
- Physical Review Letters, Vol. 105, Issue 13, Article No.136805
Low-temperature photocarrier dynamics in monolayer MoS 2
journal, September 2011
- Korn, T.; Heydrich, S.; Hirmer, M.
- Applied Physics Letters, Vol. 99, Issue 10
Ab initiomolecular dynamics for liquid metals
journal, January 1993
- Kresse, G.; Hafner, J.
- Physical Review B, Vol. 47, Issue 1, p. 558-561
Flexible and Transparent Thin-Film Transistors Based on Two-Dimensional Materials for Active-Matrix Display
journal, January 2020
- Park, Hamin; Oh, Dong Sik; Lee, Khang June
- ACS Applied Materials & Interfaces, Vol. 12, Issue 4
Deterministic strain-induced arrays of quantum emitters in a two-dimensional semiconductor
journal, May 2017
- Branny, Artur; Kumar, Santosh; Proux, Raphaël
- Nature Communications, Vol. 8, Issue 1
Visualizing Grain Statistics in MOCVD WSe2 through Four-Dimensional Scanning Transmission Electron Microscopy
journal, February 2022
- Londoño-Calderon, Alejandra; Dhall, Rohan; Ophus, Colin
- Nano Letters, Vol. 22, Issue 6
Bandgap Engineering of Strained Monolayer and Bilayer MoS2
journal, July 2013
- Conley, Hiram J.; Wang, Bin; Ziegler, Jed I.
- Nano Letters, Vol. 13, Issue 8, p. 3626-3630
Near-unity photoluminescence quantum yield in MoS2
journal, November 2015
- Amani, M.; Lien, D. -H.; Kiriya, D.
- Science, Vol. 350, Issue 6264
Site-controlled telecom-wavelength single-photon emitters in atomically-thin MoTe2
journal, November 2021
- Zhao, Huan; Pettes, Michael T.; Zheng, Yu
- Nature Communications, Vol. 12, Issue 1
Defects Engineered Monolayer MoS 2 for Improved Hydrogen Evolution Reaction
journal, January 2016
- Ye, Gonglan; Gong, Yongji; Lin, Junhao
- Nano Letters, Vol. 16, Issue 2
Defect Engineering in Single-Layer MoS 2 Using Heavy Ion Irradiation
journal, November 2018
- He, Zuyun; Zhao, Ran; Chen, Xiaofei
- ACS Applied Materials & Interfaces, Vol. 10, Issue 49
2D materials for quantum information science
journal, August 2019
- Liu, Xiaolong; Hersam, Mark C.
- Nature Reviews Materials, Vol. 4, Issue 10
From Bulk to Monolayer MoS2: Evolution of Raman Scattering
journal, January 2012
- Li, Hong; Zhang, Qing; Yap, Chin Chong Ray
- Advanced Functional Materials, Vol. 22, Issue 7
Two-dimensional MoS 2 under ion irradiation: from controlled defect production to electronic structure engineering
journal, April 2017
- Ghorbani-Asl, Mahdi; Kretschmer, Silvan; Spearot, Douglas E.
- 2D Materials, Vol. 4, Issue 2
Two-dimensional material nanophotonics
journal, November 2014
- Xia, Fengnian; Wang, Han; Xiao, Di
- Nature Photonics, Vol. 8, Issue 12
Defects activated photoluminescence in two-dimensional semiconductors: interplay between bound, charged and free excitons
journal, September 2013
- Tongay, Sefaattin; Suh, Joonki; Ataca, Can
- Scientific Reports, Vol. 3, Issue 1
Raman Spectrum of Diamond
journal, February 1970
- Solin, S. A.; Ramdas, A. K.
- Physical Review B, Vol. 1, Issue 4
Vertically Stacked 2H‐1T Dual‐Phase MoS 2 Microstructures during Lithium Intercalation: A First Principles Study
journal, August 2020
- Parida, Shayani; Mishra, Avanish; Chen, Jie
- Journal of the American Ceramic Society, Vol. 103, Issue 11
Reversible crystalline-to-amorphous phase transformation in monolayer MoS 2 under grazing ion irradiation
journal, January 2020
- Valerius, Philipp; Kretschmer, Silvan; Senkovskiy, Boris V.
- 2D Materials, Vol. 7, Issue 2
Effects of N‐Ion Implantation on the Electrical and Photoelectronic Properties of MoS
2
Field Effect Transistors
journal, November 2021
- Li, Heyi; Liu, Chaoming; Zhang, Yanqing
- physica status solidi (a), Vol. 219, Issue 1
Temperature-dependent photoluminescence and time-resolved photoluminescence study of monolayer molybdenum disulfide
journal, September 2020
- Li, H.; Zhang, X. H.
- Optical Materials, Vol. 107
Nanopatterning and Electrical Tuning of MoS 2 Layers with a Subnanometer Helium Ion Beam
journal, July 2015
- Fox, Daniel S.; Zhou, Yangbo; Maguire, Pierce
- Nano Letters, Vol. 15, Issue 8
Two‐dimensional materials: From mechanical properties to flexible mechanical sensors
journal, December 2019
- Jiang, Hanjun; Zheng, Lu; Liu, Zheng
- InfoMat, Vol. 2, Issue 6
Improving stability of organometallic-halide perovskite solar cells using exfoliation two-dimensional molybdenum chalcogenides
journal, November 2020
- Liang, Meiying; Ali, Adnan; Belaidi, Abdelhak
- npj 2D Materials and Applications, Vol. 4, Issue 1
Photodetectors of 2D Materials from Ultraviolet to Terahertz Waves
journal, March 2021
- Qiu, Qinxi; Huang, Zhiming
- Advanced Materials, Vol. 33, Issue 15
Phase transition of a MoS2 monolayer through top layer desulfurization by He+ ion irradiation
journal, June 2022
- Han, Sang Wook; Yun, Won Seok; Kang, Manil
- Journal of Applied Physics, Vol. 131, Issue 22
First principles phonon calculations in materials science
journal, November 2015
- Togo, Atsushi; Tanaka, Isao
- Scripta Materialia, Vol. 108
Effect of disorder on Raman scattering of single-layer
journal, May 2015
- Mignuzzi, Sandro; Pollard, Andrew J.; Bonini, Nicola
- Physical Review B, Vol. 91, Issue 19
Single quantum emitters in monolayer semiconductors
journal, May 2015
- He, Yu-Ming; Clark, Genevieve; Schaibley, John R.
- Nature Nanotechnology, Vol. 10, Issue 6
Site-Controlled Quantum Emitters in Monolayer MoSe 2
journal, March 2021
- Yu, Leo; Deng, Minda; Zhang, Jingyuan Linda
- Nano Letters, Vol. 21, Issue 6
Few-Layer MoS 2 : A Promising Layered Semiconductor
journal, April 2014
- Ganatra, Rudren; Zhang, Qing
- ACS Nano, Vol. 8, Issue 5
Materials for Flexible, Stretchable Electronics: Graphene and 2D Materials
journal, July 2015
- Kim, Sang Jin; Choi, Kyoungjun; Lee, Bora
- Annual Review of Materials Research, Vol. 45, Issue 1
Quantum Calligraphy: Writing Single-Photon Emitters in a Two-Dimensional Materials Platform
journal, December 2018
- Rosenberger, Matthew R.; Dass, Chandriker Kavir; Chuang, Hsun-Jen
- ACS Nano, Vol. 13, Issue 1
Giant Mechano-Optoelectronic Effect in an Atomically Thin Semiconductor
journal, March 2018
- Wu, Wei; Wang, Jin; Ercius, Peter
- Nano Letters, Vol. 18, Issue 4
Magnetism in MoS 2 induced by proton irradiation
journal, September 2012
- Mathew, S.; Gopinadhan, K.; Chan, T. K.
- Applied Physics Letters, Vol. 101, Issue 10
Radiation-induced direct bandgap transition in few-layer MoS 2
journal, September 2017
- Wang, Bo; Yang, Sisi; Chen, Jihan
- Applied Physics Letters, Vol. 111, Issue 13
Two-dimensional flexible nanoelectronics
journal, December 2014
- Akinwande, Deji; Petrone, Nicholas; Hone, James
- Nature Communications, Vol. 5, Issue 1
Single-layer MoS2 transistors
journal, January 2011
- Radisavljevic, B.; Radenovic, A.; Brivio, J.
- Nature Nanotechnology, Vol. 6, Issue 3, p. 147-150
Impact of ion beam irradiation on two-dimensional MoS2: a molecular dynamics simulation study
journal, November 2021
- Wu, Xin; Zhu, Xiaobao; Lei, Bing
- Journal of Physics: Condensed Matter, Vol. 34, Issue 5
Enhanced photocatalytic performance and stability of 1T MoS2 transformed from 2H MoS2 via Li intercalation
journal, March 2019
- Xia, Zhonghuai; Tao, Yaqiu; Pan, Zhigang
- Results in Physics, Vol. 12
Microsecond Valley Lifetime of Defect-Bound Excitons in Monolayer WSe 2
journal, August 2018
- Moody, Galan; Tran, Kha; Lu, Xiaobo
- Physical Review Letters, Vol. 121, Issue 5