Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration
Abstract
We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. Furthermore, the highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.
- Authors:
-
- Univ. of Illinois, Urbana, IL (United States); California Institute of Technology (CalTech), Pasadena, CA (United States)
- Univ. of Illinois, Urbana, IL (United States)
- Publication Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; NSF CAREER; USDOE
- OSTI Identifier:
- 1875679
- Alternate Identifier(s):
- OSTI ID: 1226776
- Grant/Contract Number:
- FG02-07ER46471
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 107; Journal Issue: 3; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Chemical vapor deposition; Optical properties; Photonic integrated circuits; Semiconductors; Optical fibers; Optical communications; Photodetectors; Photolithography; Etching; Waveguides
Citation Formats
Yu, Xin, Arbabi, Ehsan, Goddard, Lynford L., Li, Xiuling, and Chen, Xiaogang. Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration. United States: N. p., 2015.
Web. doi:10.1063/1.4927243.
Yu, Xin, Arbabi, Ehsan, Goddard, Lynford L., Li, Xiuling, & Chen, Xiaogang. Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration. United States. https://doi.org/10.1063/1.4927243
Yu, Xin, Arbabi, Ehsan, Goddard, Lynford L., Li, Xiuling, and Chen, Xiaogang. Mon .
"Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration". United States. https://doi.org/10.1063/1.4927243. https://www.osti.gov/servlets/purl/1875679.
@article{osti_1875679,
title = {Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration},
author = {Yu, Xin and Arbabi, Ehsan and Goddard, Lynford L. and Li, Xiuling and Chen, Xiaogang},
abstractNote = {We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. Furthermore, the highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.},
doi = {10.1063/1.4927243},
journal = {Applied Physics Letters},
number = 3,
volume = 107,
place = {United States},
year = {Mon Jul 20 00:00:00 EDT 2015},
month = {Mon Jul 20 00:00:00 EDT 2015}
}
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