skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

This content will become publicly available on November 14, 2020

Title: Thermal conductivity of crystalline AlN and the influence of atomic-scale defects

Authors:
 [1]; ORCiD logo [2];  [3]; ORCiD logo [4];  [5];  [6];  [7];  [8]; ORCiD logo [9];  [9]; ORCiD logo [10]
  1. Electrical Engineering, Stanford University, Stanford, California 94305, USA
  2. Electrical Engineering, Stanford University, Stanford, California 94305, USA; Thermal and Fluid Engineering, University of Twente, Enschede 7500 AE, Netherlands
  3. Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA
  4. Electrical Engineering, Stanford University, Stanford, California 94305, USA; Mechanical Engineering, Stanford University, Stanford, California 94305, USA; Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, USA
  5. Physics and Astronomy, University of California, Los Angeles, California 90095, USA
  6. LITEN, CEA-Grenoble, 17 Avenue des Martyrs, 38054 Grenoble, France; Centre for Modeling and Simulation (CMS), Savitribai Phule Pune University, Ganeshkhind, Pune 411007, Maharashtra, India
  7. LITEN, CEA-Grenoble, 17 Avenue des Martyrs, 38054 Grenoble, France
  8. Mechanical Engineering, Stanford University, Stanford, California 94305, USA; Materials Science and Engineering, Stanford University, Stanford, California 94305, USA
  9. Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA; Materials Science and Engineering, Cornell University, Ithaca, New York 14853, USA
  10. Electrical Engineering, Stanford University, Stanford, California 94305, USA; Materials Science and Engineering, Stanford University, Stanford, California 94305, USA
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1604926
Grant/Contract Number:  
[AC02-76SF00515; EEC-1449548; 1534279; 1534303; ECCS-1542152; FA9550615-1-0187 DEF; IFA17-MS122]
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
[ Journal Volume: 126; Journal Issue: 18]; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English

Citation Formats

Xu, Runjie Lily, Muñoz Rojo, Miguel, Islam, S. M., Sood, Aditya, Vareskic, Bozo, Katre, Ankita, Mingo, Natalio, Goodson, Kenneth E., Xing, Huili Grace, Jena, Debdeep, and Pop, Eric. Thermal conductivity of crystalline AlN and the influence of atomic-scale defects. United States: N. p., 2019. Web. doi:10.1063/1.5097172.
Xu, Runjie Lily, Muñoz Rojo, Miguel, Islam, S. M., Sood, Aditya, Vareskic, Bozo, Katre, Ankita, Mingo, Natalio, Goodson, Kenneth E., Xing, Huili Grace, Jena, Debdeep, & Pop, Eric. Thermal conductivity of crystalline AlN and the influence of atomic-scale defects. United States. doi:10.1063/1.5097172.
Xu, Runjie Lily, Muñoz Rojo, Miguel, Islam, S. M., Sood, Aditya, Vareskic, Bozo, Katre, Ankita, Mingo, Natalio, Goodson, Kenneth E., Xing, Huili Grace, Jena, Debdeep, and Pop, Eric. Thu . "Thermal conductivity of crystalline AlN and the influence of atomic-scale defects". United States. doi:10.1063/1.5097172.
@article{osti_1604926,
title = {Thermal conductivity of crystalline AlN and the influence of atomic-scale defects},
author = {Xu, Runjie Lily and Muñoz Rojo, Miguel and Islam, S. M. and Sood, Aditya and Vareskic, Bozo and Katre, Ankita and Mingo, Natalio and Goodson, Kenneth E. and Xing, Huili Grace and Jena, Debdeep and Pop, Eric},
abstractNote = {},
doi = {10.1063/1.5097172},
journal = {Journal of Applied Physics},
number = [18],
volume = [126],
place = {United States},
year = {2019},
month = {11}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on November 14, 2020
Publisher's Version of Record

Save / Share:

Works referenced in this record:

Breakdown mechanism in 1 kA/cm 2 and 960 V E-mode β -Ga 2 O 3 vertical transistors
journal, September 2018

  • Hu, Zongyang; Nomoto, Kazuki; Li, Wenshen
  • Applied Physics Letters, Vol. 113, Issue 12
  • DOI: 10.1063/1.5038105

Deep-UV emission at 219 nm from ultrathin MBE GaN/AlN quantum heterostructures
journal, August 2017

  • Islam, S. M.; Protasenko, Vladimir; Lee, Kevin
  • Applied Physics Letters, Vol. 111, Issue 9
  • DOI: 10.1063/1.5000844

Deep ultraviolet emission from ultra-thin GaN/AlN heterostructures
journal, December 2016

  • Bayerl, Dylan; Islam, Sm; Jones, Christina M.
  • Applied Physics Letters, Vol. 109, Issue 24
  • DOI: 10.1063/1.4971968

Heat Generation and Transport in Nanometer-Scale Transistors
journal, August 2006


Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy
journal, January 2003

  • Kuball, M.; Rajasingam, S.; Sarua, A.
  • Applied Physics Letters, Vol. 82, Issue 1
  • DOI: 10.1063/1.1534935

High-excitation and high-resolution photoluminescence spectra of bulk AlN
journal, August 2010


Band structure and fundamental optical transitions in wurtzite AlN
journal, December 2003

  • Li, J.; Nam, K. B.; Nakarmi, M. L.
  • Applied Physics Letters, Vol. 83, Issue 25
  • DOI: 10.1063/1.1633965

Epitaxially grown AlN and its optical band gap
journal, January 1973

  • Yim, W. M.; Stofko, E. J.; Zanzucchi, P. J.
  • Journal of Applied Physics, Vol. 44, Issue 1
  • DOI: 10.1063/1.1661876

AlN metal–semiconductor field-effect transistors using Si-ion implantation
journal, March 2018

  • Okumura, Hironori; Suihkonen, Sami; Lemettinen, Jori
  • Japanese Journal of Applied Physics, Vol. 57, Issue 4S
  • DOI: 10.7567/JJAP.57.04FR11

An AlN/Al 0.85 Ga 0.15 N high electron mobility transistor
journal, July 2016

  • Baca, Albert G.; Armstrong, Andrew M.; Allerman, Andrew A.
  • Applied Physics Letters, Vol. 109, Issue 3
  • DOI: 10.1063/1.4959179

Thermal Conductivity of the Elements
journal, April 1972

  • Ho, C. Y.; Powell, R. W.; Liley, P. E.
  • Journal of Physical and Chemical Reference Data, Vol. 1, Issue 2
  • DOI: 10.1063/1.3253100

Phonon Scattering in Semiconductors From Thermal Conductivity Studies
journal, April 1964


Thermal Conductivity of GaAs and GaAs 1− x P x Laser Semiconductors
journal, February 1965

  • Carlson, R. O.; Slack, G. A.; Silverman, S. J.
  • Journal of Applied Physics, Vol. 36, Issue 2
  • DOI: 10.1063/1.1714018

Thermal Conductivity of Pure and Impure Silicon, Silicon Carbide, and Diamond
journal, December 1964

  • Slack, Glen A.
  • Journal of Applied Physics, Vol. 35, Issue 12
  • DOI: 10.1063/1.1713251

Ultrahigh thermal conductivity confirmed in boron arsenide
journal, August 2018


High thermal conductivity in cubic boron arsenide crystals
journal, July 2018


Thermal Conductivity of Amorphous Silicon
journal, May 1996

  • Wada, Hiroshi; Kamijoh, Takeshi
  • Japanese Journal of Applied Physics, Vol. 35, Issue Part 2, No. 5B
  • DOI: 10.1143/JJAP.35.L648

Thermal conductivity of doped polysilicon layers
journal, January 2001

  • McConnell, A. D.; Uma, S.; Goodson, K. E.
  • Journal of Microelectromechanical Systems, Vol. 10, Issue 3
  • DOI: 10.1109/84.946782

Thermal diffusivity and thermal conductivity of single-crystal MgO and Al2O3 and related compounds as a function of temperature
journal, January 2014


Thermal conductivity measurement from 30 to 750 K: the 3ω method
journal, February 1990

  • Cahill, David G.
  • Review of Scientific Instruments, Vol. 61, Issue 2
  • DOI: 10.1063/1.1141498

Heat transport in thin dielectric films
journal, March 1997

  • Lee, S. -M.; Cahill, David G.
  • Journal of Applied Physics, Vol. 81, Issue 6
  • DOI: 10.1063/1.363923

Heat capacity and thermal conductivity of hexagonal pyrolytic boron nitride
journal, May 1976


The intrinsic thermal conductivity of AIN
journal, January 1987

  • Slack, Glen A.; Tanzilli, R. A.; Pohl, R. O.
  • Journal of Physics and Chemistry of Solids, Vol. 48, Issue 7
  • DOI: 10.1016/0022-3697(87)90153-3

The influence of point defects on the thermal conductivity of AlN crystals
journal, May 2018

  • Rounds, Robert; Sarkar, Biplab; Alden, Dorian
  • Journal of Applied Physics, Vol. 123, Issue 18
  • DOI: 10.1063/1.5028141

The role of the carbon-silicon complex in eliminating deep ultraviolet absorption in AlN
journal, May 2014

  • Gaddy, Benjamin E.; Bryan, Zachary; Bryan, Isaac
  • Applied Physics Letters, Vol. 104, Issue 20
  • DOI: 10.1063/1.4878657

Measuring the Thermal Conductivity of thin Films: 3 Omega and Related Electrothermal Methods
journal, January 2013


1ω,2ω, and 3ω methods for measurements of thermal properties
journal, December 2005

  • Dames, Chris; Chen, Gang
  • Review of Scientific Instruments, Vol. 76, Issue 12
  • DOI: 10.1063/1.2130718

Quasi-ballistic Electronic Thermal Conduction in Metal Inverse Opals
journal, March 2016


Thermal conductivity of GaN films: Effects of impurities and dislocations
journal, September 2002

  • Zou, J.; Kotchetkov, D.; Balandin, A. A.
  • Journal of Applied Physics, Vol. 92, Issue 5
  • DOI: 10.1063/1.1497704

Analysis of heat flow in layered structures for time-domain thermoreflectance
journal, December 2004

  • Cahill, David G.
  • Review of Scientific Instruments, Vol. 75, Issue 12
  • DOI: 10.1063/1.1819431

Anisotropic and inhomogeneous thermal conduction in suspended thin-film polycrystalline diamond
journal, May 2016

  • Sood, Aditya; Cho, Jungwan; Hobart, Karl D.
  • Journal of Applied Physics, Vol. 119, Issue 17
  • DOI: 10.1063/1.4948335

Direct Visualization of Thermal Conductivity Suppression Due to Enhanced Phonon Scattering Near Individual Grain Boundaries
journal, April 2018


Thermal conduction in AlxGa1−xN alloys and thin films
journal, April 2005

  • Liu, Weili; Balandin, Alexander A.
  • Journal of Applied Physics, Vol. 97, Issue 7
  • DOI: 10.1063/1.1868876

Calculated thermoelectric properties of In x Ga 1−x N, In x Al 1−x N, and Al x Ga 1−x N
journal, May 2013

  • Sztein, Alexander; Haberstroh, John; Bowers, John E.
  • Journal of Applied Physics, Vol. 113, Issue 18
  • DOI: 10.1063/1.4804174

Effect of nitrogen and vacancy defects on the thermal conductivity of diamond: An ab initio Green's function approach
journal, September 2014


Exceptionally Strong Phonon Scattering by B Substitution in Cubic SiC
journal, August 2017


Phonon transport unveils the prevalent point defects in GaN
journal, May 2018


Ab initio thermal transport in compound semiconductors
journal, April 2013


First-principles calculations of the ferroelastic transition between rutile-type and CaCl 2 -type SiO 2 at high pressures
journal, October 2008


ShengBTE: A solver of the Boltzmann transport equation for phonons
journal, June 2014

  • Li, Wu; Carrete, Jesús; A. Katcho, Nebil
  • Computer Physics Communications, Vol. 185, Issue 6
  • DOI: 10.1016/j.cpc.2014.02.015

From ultrasoft pseudopotentials to the projector augmented-wave method
journal, January 1999


almaBTE : A solver of the space–time dependent Boltzmann transport equation for phonons in structured materials
journal, November 2017


First principles study of thermal conductivity cross-over in nanostructured zinc-chalcogenides
journal, January 2015

  • Katre, Ankita; Togo, Atsushi; Tanaka, Isao
  • Journal of Applied Physics, Vol. 117, Issue 4
  • DOI: 10.1063/1.4906461

Nonmetallic crystals with high thermal conductivity
journal, January 1973


Microstructure and thermal conductivity of epitaxial AlN thin films
journal, December 1994


Thermal Analysis of High-Power Flip-Chip-Bonded Photodiodes
journal, October 2017

  • Shen, Yang; Gaskins, John; Xie, Xiaojun
  • Journal of Lightwave Technology, Vol. 35, Issue 19
  • DOI: 10.1109/JLT.2017.2736884

Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films
journal, October 2004

  • Zhao, Yimin; Zhu, Chunlin; Wang, Sigen
  • Journal of Applied Physics, Vol. 96, Issue 8
  • DOI: 10.1063/1.1785850

Thermal Conductivity of AlN and SiC Thin Films
journal, May 2006

  • Choi, Sun Rock; Kim, Dongsik; Choa, Sung-Hoon
  • International Journal of Thermophysics, Vol. 27, Issue 3
  • DOI: 10.1007/s10765-006-0062-1

Universal phonon mean free path spectra in crystalline semiconductors at high temperature
journal, October 2013

  • Freedman, Justin P.; Leach, Jacob H.; Preble, Edward A.
  • Scientific Reports, Vol. 3, Issue 1
  • DOI: 10.1038/srep02963

Reduced Thermal Conductivity in Nanoengineered Rough Ge and GaAs Nanowires
journal, April 2010

  • Martin, Pierre N.; Aksamija, Zlatan; Pop, Eric
  • Nano Letters, Vol. 10, Issue 4
  • DOI: 10.1021/nl902720v

Surface roughness and thermal conductivity of semiconductor nanowires: Going below the Casimir limit
journal, August 2011


Thermal Conductivity and Seebeck Coefficient of InP
journal, March 1964


Thermal conductivity of GaN crystals grown by high pressure method
journal, November 2003

  • Jeżowski, A.; Stachowiak, P.; Plackowski, T.
  • physica status solidi (b), Vol. 240, Issue 2, p. 447-450
  • DOI: 10.1002/pssb.200303341

Accurate dependence of gallium nitride thermal conductivity on dislocation density
journal, August 2006

  • Mion, C.; Muth, J. F.; Preble, E. A.
  • Applied Physics Letters, Vol. 89, Issue 9
  • DOI: 10.1063/1.2335972

Anisotropic thermal conductivity in single crystal β-gallium oxide
journal, March 2015

  • Guo, Zhi; Verma, Amit; Wu, Xufei
  • Applied Physics Letters, Vol. 106, Issue 11
  • DOI: 10.1063/1.4916078