Analysis of a planetary-rotation system for evaporated optical coatings

Oliver, J. B.

doi:10.1364/AO.55.008550

Title: Analysis of a planetary-rotation system for evaporated optical coatings

Abstract

The impact of planetary-design considerations for optical coating deposition is analyzed, including the ideal number of planets, variations in system performance, and the deviation of planet motion from the ideal. System capacity is maximized for four planets, although substrate size can significantly influence this result. Guidance is provided in the design of high-performance deposition systems based on the relative impact of different error modes. As a result, errors in planet mounting such that the planet surface is not perpendicular to its axis of rotation are particularly problematic, suggesting planetary design modifications would be appropriate.

Authors:

Oliver, J. B. ^[1]

Univ. of Rochester, Rochester, NY (United States)

Publication Date:: Fri Jan 01 00:00:00 EST 2016

Research Org.:: Univ. of Rochester, NY (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1330097

Alternate Identifier(s):: OSTI ID: 1329087

Grant/Contract Number:: NA0001944

Resource Type:: Accepted Manuscript

Journal Name:: Applied Optics

Additional Journal Information:: Journal Volume: 55; Journal Issue: 30; Journal ID: ISSN 0003-6935

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization

Citation Formats


                    Oliver, J. B. Analysis of a planetary-rotation system for evaporated optical coatings.  United States: N. p., 2016. 
Web.  doi:10.1364/AO.55.008550.

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                    Oliver, J. B. Analysis of a planetary-rotation system for evaporated optical coatings.  United States.  https://doi.org/10.1364/AO.55.008550

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                    Oliver, J. B. Fri .  
"Analysis of a planetary-rotation system for evaporated optical coatings".  United States.  https://doi.org/10.1364/AO.55.008550.  https://www.osti.gov/servlets/purl/1330097.

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@article{osti_1330097,

  title        = {Analysis of a planetary-rotation system for evaporated optical coatings},

  author       = {Oliver, J. B.},

  abstractNote = {The impact of planetary-design considerations for optical coating deposition is analyzed, including the ideal number of planets, variations in system performance, and the deviation of planet motion from the ideal. System capacity is maximized for four planets, although substrate size can significantly influence this result. Guidance is provided in the design of high-performance deposition systems based on the relative impact of different error modes. As a result, errors in planet mounting such that the planet surface is not perpendicular to its axis of rotation are particularly problematic, suggesting planetary design modifications would be appropriate.},

  doi          = {10.1364/AO.55.008550},

  journal      = {Applied Optics},

  number       = 30,

  volume       = 55,

  place        = {United States},

  year         = {Fri Jan 01 00:00:00 EST 2016},

  month        = {Fri Jan 01 00:00:00 EST 2016}

}

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https://doi.org/10.1364/AO.55.008550

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Cited by: 10 works

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Works referenced in this record:

Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system
journal, January 2006

Oliver, James B.; Talbot, David
Applied Optics, Vol. 45, Issue 13
DOI: 10.1364/AO.45.003097

Measurements of angular evaporation characteristics of sources
journal, July 1983

Dobrowolski, J. A.; Ranger, M.; Wilkinson, R. L.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 1, Issue 3
DOI: 10.1116/1.572030

A spatial distribution study of a beam vapour emitted by electron-beam-heated evaporation sources
journal, January 1996

Chaleix, D.; Choquet, P.; Bessaudou, A.
Journal of Physics D: Applied Physics, Vol. 29, Issue 1
DOI: 10.1088/0022-3727/29/1/032

Plasma-ion-assisted coatings for 15 femtosecond laser systems
journal, January 2014

Oliver, J. B.; Bromage, J.; Smith, C.
Applied Optics, Vol. 53, Issue 4
DOI: 10.1364/AO.53.00A221

Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
journal, January 2013

Guo, Chun; Kong, Mingdong; Liu, Cunding
Applied Optics, Vol. 52, Issue 4
DOI: 10.1364/AO.52.000B26

Works referencing / citing this record:

Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition
journal, September 2018

Wang, Ben; Fu, Xiuhua; Song, Shigeng
Coatings, Vol. 8, Issue 9
DOI: 10.3390/coatings8090325

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Similar Records

Title: Analysis of a planetary-rotation system for evaporated optical coatings

Abstract

Citation Formats

Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system journal, January 2006

Measurements of angular evaporation characteristics of sources journal, July 1983

A spatial distribution study of a beam vapour emitted by electron-beam-heated evaporation sources journal, January 1996

Plasma-ion-assisted coatings for 15 femtosecond laser systems journal, January 2014

Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system journal, January 2013

Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition journal, September 2018

Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system
journal, January 2006

Measurements of angular evaporation characteristics of sources
journal, July 1983

A spatial distribution study of a beam vapour emitted by electron-beam-heated evaporation sources
journal, January 1996

Plasma-ion-assisted coatings for 15 femtosecond laser systems
journal, January 2014

Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
journal, January 2013

Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition
journal, September 2018