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Title: Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings

Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Furthermore, guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.
Authors:
 [1]
  1. Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
Publication Date:
Report Number(s):
2016-223; 1321
Journal ID: ISSN 0003-6935; APOPAI; 2016-223; 2276; 1321
Grant/Contract Number:
NA0001944
Type:
Accepted Manuscript
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 56; Journal Issue: 5; Journal ID: ISSN 0003-6935
Publisher:
Optical Society of America (OSA)
Research Org:
Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Contributing Orgs:
Laboratory for Laser Energetics, University of Rochester
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization
OSTI Identifier:
1347440
Alternate Identifier(s):
OSTI ID: 1342619

Oliver, J. B.. Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings. United States: N. p., Web. doi:10.1364/AO.56.001460.
Oliver, J. B.. Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings. United States. doi:10.1364/AO.56.001460.
Oliver, J. B.. 2017. "Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings". United States. doi:10.1364/AO.56.001460. https://www.osti.gov/servlets/purl/1347440.
@article{osti_1347440,
title = {Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings},
author = {Oliver, J. B.},
abstractNote = {Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Furthermore, guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.},
doi = {10.1364/AO.56.001460},
journal = {Applied Optics},
number = 5,
volume = 56,
place = {United States},
year = {2017},
month = {2}
}